Invention Grant
- Patent Title: Determination of emission parameters from field emission sources
- Patent Title (中): 确定场排放源的排放参数
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Application No.: US13648887Application Date: 2012-10-10
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Publication No.: US08779376B2Publication Date: 2014-07-15
- Inventor: Lynwood W. Swanson , Gregory A. Schwind , Sean Kellogg , Kun Liu
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Main IPC: G01T1/29
- IPC: G01T1/29 ; H01J37/00 ; H01J37/02

Abstract:
The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor β function is determined by series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.
Public/Granted literature
- US20130187058A1 Determination of Emission Parameters from Field Emission Sources Public/Granted day:2013-07-25
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