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1.发明授权公开(公告)号：US11749498B2
公开(公告)日：2023-09-05
申请号：US17559553
申请日：2021-12-22
Applicant: FEI Company
Inventor： Marcus Straw , Alexander Makarov , Josh Gilbert , Aaron Torok , Joseph Christian , Alan Bahm , Kun Liu , Tom Nichols , Jeff Kosmoski , Dmitry Grinfeld
IPC: H01J37/295 , H01J37/20 , H01J49/42
CPC classification number: H01J37/295 , H01J37/20 , H01J49/4215
Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.
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公开(公告)号：US11749492B2
公开(公告)日：2023-09-05
申请号：US17654759
申请日：2022-03-14
Applicant: FEI Company
Inventor： Kun Liu , Gregory A. Schwind , Alan S. Bahm
IPC: H01J37/073 , H01J9/02
CPC classification number: H01J37/073 , H01J9/025 , H01J2237/06341
Abstract: An electron source has an insulating base, a pair of conductive terminals, an insulating support member, a drift isolation member, an emitter-cathode, and one or more heating elements. The conductive terminals are exposed from a first surface of the insulating base. The insulating support member extends from the first surface of the insulating base. The drift isolation member is disposed at an end of the insulating support member remote from the insulating base. The emitter-cathode is coupled to the drift isolation member. The one or more heating elements are coupled to the conductive terminals and the drift isolation member. The combination of the drift isolation member with the insulating support member can prevent stress-induced drift from impacting position of the emitter-cathode, thereby improving the mechanical stability of the electron source.
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公开(公告)号：US11114272B2
公开(公告)日：2021-09-07
申请号：US16583163
申请日：2019-09-25
Applicant: FEI Company
Inventor： Kun Liu , Erik Kieft
Abstract: Charged particle beams (CPBs) are modulated using a beam blanker/deflector and an electrically pulsed extraction electrode in conjunction with a field emitter and a gun lens. With such modulation, CPBs can provide both pulsed and continuous mode operation as required for a particular application, while average CPB current is maintained within predetermined levels, such as levels that promote X-ray safe operation. Either the extraction electrode or the beam blanker/deflector can define CPB pulse width, CPB on/off ratio, or both.
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公开(公告)号：US20210181676A1
公开(公告)日：2021-06-17
申请号：US16717760
申请日：2019-12-17
Applicant: FEI Company
Inventor： Kun Liu , Alan Bahm , Marcus Straw
IPC: G03H1/08
Abstract: Apparatuses and methods for improved reconstructions of electron-based holograms are disclosed herein. An example method at least includes forming a hologram of a sample and a known object, forming a reconstruction of the known object using a reconstruction algorithm, comparing the reconstruction of the known object to a reference reconstruction of the known object, and adjusting the reconstruction algorithm based on the comparison of the reconstruction of the known object to the reference reconstruction of the known object. The example method may further include forming a reconstruction of the sample using the adjusted reconstruction algorithm.
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公开(公告)号：US08779376B2
公开(公告)日：2014-07-15
申请号：US13648887
申请日：2012-10-10
Applicant: FEI Company
Inventor： Lynwood W. Swanson , Gregory A. Schwind , Sean Kellogg , Kun Liu
CPC classification number: H01J37/00 , G01T1/29 , H01J37/02 , H01J37/073 , H01J2237/06316 , H01J2237/06341 , H01J2237/065
Abstract: The state of an emitter can be determined by measurements of how the current changes with the extraction voltage. A field factor β function is determined by series of relatively simple measurements of charged particles emitted at different conditions. The field factor can then be used to determine derived characteristics of the emission that, in the prior art, were difficult to determine without removing the source from the focusing column and mounting it in a specialized apparatus. The relations are determined by the source configuration and have been found to be independent of the emitter shape, and so emission character can be determined as the emitter shape changes over time, without having to determine the emitter shape and without having to redefine the relation between the field factor and the series of relatively simple measurements, and the relationships between the field factor and other emission parameters.
Abstract translation: 发射极的状态可以通过测量电流如何随提取电压而变化来确定。 场因子 功能通过在不同条件下发射的带电粒子的一系列相对简单的测量来确定。 然后可以使用场因子来确定发射的导出特性，在现有技术中难以确定，而不需要从聚焦柱移除源并将其安装在专门的装置中。 关系由源配置确定，并且已经被发现与发射体形状无关，因此发射体形状随着时间的推移而被确定，而不必确定发射体形状，而不必重新定义发射体形状之间的关系 场因子和一系列相对简单的测量，以及场因子与其他发射参数之间的关系。
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Patent Agency Ranking
公开(公告)号：US20220293387A1
公开(公告)日：2022-09-15
申请号：US17654759
申请日：2022-03-14
Applicant: FEI Company
Inventor： Kun Liu , Gregory A. Schwind , Alan S. Bahm
IPC: H01J37/073 , H01J9/02
Abstract: An electron source has an insulating base, a pair of conductive terminals, an insulating support member, a drift isolation member, an emitter-cathode, and one or more heating elements. The conductive terminals are exposed from a first surface of the insulating base. The insulating support member extends from the first surface of the insulating base. The drift isolation member is disposed at an end of the insulating support member remote from the insulating base. The emitter-cathode is coupled to the drift isolation member. The one or more heating elements are coupled to the conductive terminals and the drift isolation member. The combination of the drift isolation member with the insulating support member can prevent stress-induced drift from impacting position of the emitter-cathode, thereby improving the mechanical stability of the electron source.
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公开(公告)号：US20220084806A1
公开(公告)日：2022-03-17
申请号：US17468478
申请日：2021-09-07
Applicant: Thermo Fisher Scientific (Bremen) GmbH , FEI Company
Inventor： Alexander Makarov , Wilko Balschun , Kyle Fort , Kun Liu
Abstract: A coupling for connecting together vacuum-based analytical systems requiring to be vibrationally isolated, comprising: a tubular connector having a longitudinal axis, the connector comprising a first end for connection to a first analytical system and a flexible portion reducing transmission of vibrations and permitting displacement of the first analytical system in a direction transverse to the longitudinal axis of the connector; and a seal longitudinally separated from the flexible portion, for vacuum sealing between the connector and a second analytical system; wherein the connector contains ion optics for transmitting ions between the first and second analytical systems.
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公开(公告)号：US20210090846A1
公开(公告)日：2021-03-25
申请号：US16583163
申请日：2019-09-25
Applicant: FEI Company
Inventor： Kun Liu , Erik Kieft
Abstract: Charged particle beams (CPBs) are modulated using a beam blanker/deflector and an electrically pulsed extraction electrode in conjunction with a field emitter and a gun lens. With such modulation, CPBs can provide both pulsed and continuous mode operation as required for a particular application, while average CPB current is maintained within predetermined levels, such as levels that promote X-ray safe operation. Either the extraction electrode or the beam blanker/deflector can define CPB pulse width, CPB on/off ratio, or both.
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9.发明申请公开(公告)号：US20220115205A1
公开(公告)日：2022-04-14
申请号：US17559553
申请日：2021-12-22
Applicant: FEI Company
Inventor： Marcus Straw , Alexander Makarov , Josh Gilbert , Aaron Torok , Joseph Christian , Alan Bahm , Kun Liu , Tom Nichols , Jeff Kosmoski , Dmitry Grinfeld
IPC: H01J37/295 , H01J49/42 , H01J37/20
Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location. The imaging system including a charge particle emitter coupled to direct coherent charged particles toward the sample; and a detector arranged to detect interference patterns formed from interaction of the coherent charged particles and the sample.
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公开(公告)号：US11699582B2
公开(公告)日：2023-07-11
申请号：US17468478
申请日：2021-09-07
Applicant: Thermo Fisher Scientific (Bremen) GmbH , FEI Company
Inventor： Alexander Makarov , Wilko Balschun , Kyle Fort , Kun Liu
CPC classification number: H01J49/063 , H01J37/02 , H01J2237/0216 , H01J2237/182
Abstract: A coupling for connecting together vacuum-based analytical systems requiring to be vibrationally isolated, comprising: a tubular connector having a longitudinal axis, the connector comprising a first end for connection to a first analytical system and a flexible portion reducing transmission of vibrations and permitting displacement of the first analytical system in a direction transverse to the longitudinal axis of the connector; and a seal longitudinally separated from the flexible portion, for vacuum sealing between the connector and a second analytical system; wherein the connector contains ion optics for transmitting ions between the first and second analytical systems.
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