Invention Grant
- Patent Title: Method for manufacturing a plurality of chips
- Patent Title (中): 制造多个芯片的方法
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Application No.: US13665501Application Date: 2012-10-31
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Publication No.: US08785234B2Publication Date: 2014-07-22
- Inventor: Gunther Mackh , Adolf Koller
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater & Matsil, L.L.P.
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
A method for manufacturing a plurality of chips comprises the step of providing a wafer comprising a plurality of chip areas separated by one or more dicing lines, wherein the chip areas are arranged on a first main surface, the step of providing a laser absorption layer on a second main surface opposite to the first main surface and the step of providing a backside metal stack on the laser absorption layer. After that a laser light is applied to the laser absorption layer along the dicing lines before the chips are singulated along the dicing lines by using stealth dicing.
Public/Granted literature
- US20140117505A1 Chip Having Backside Metal and Method for Manufacturing Same Public/Granted day:2014-05-01
Information query
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