Invention Grant
- Patent Title: On-chip thin film Zernike phase plate and applications thereof
- Patent Title (中): 片式薄膜泽尼克相片及其应用
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Application No.: US14107162Application Date: 2013-12-16
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Publication No.: US08791416B2Publication Date: 2014-07-29
- Inventor: Yunn-Shin Shiue , Pai-Chia Kuo , Chih-Ting Chen , Yuh-Lin Wang , Yong-Fen Hsieh
- Applicant: Academia Sinica
- Applicant Address: TW Taipei
- Assignee: Academia Sinica
- Current Assignee: Academia Sinica
- Current Assignee Address: TW Taipei
- Agency: Bacon & Thomas, PLLC
- Main IPC: H01J37/26
- IPC: H01J37/26 ; H01J37/04 ; G01N23/02 ; G21K1/08
Abstract:
The present invention provides an on-chip thin film phase plate for a releasing charging, comprising a chip substrate having one or more apertures; and a thin film layer attached to the top surface of the chip substrate. The present invention also provides a method for observing organic material by TEM, which uses the above-mentioned on-chip thin film phase plate in a TEM system.
Public/Granted literature
- US20140166880A1 ON-CHIP THIN FILM ZERNIKE PHASE PLATE AND APPLICATIONS THEREOF Public/Granted day:2014-06-19
Information query
