发明授权
US08791520B2 Non-volatile memory devices having a floating gate cap between a floating gate and a gate insulating layer
有权
在浮置栅极和栅极绝缘层之间具有浮动栅极盖的非易失性存储器件
- 专利标题: Non-volatile memory devices having a floating gate cap between a floating gate and a gate insulating layer
- 专利标题(中): 在浮置栅极和栅极绝缘层之间具有浮动栅极盖的非易失性存储器件
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申请号: US12986553申请日: 2011-01-07
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公开(公告)号: US08791520B2公开(公告)日: 2014-07-29
- 发明人: Jaeduk Lee , Albert Fayrushin , ByungKyu Cho , Jungdal Choi , Sunghoi Hur , Kwang Soo Seol , Dohyun Lee
- 申请人: Jaeduk Lee , Albert Fayrushin , ByungKyu Cho , Jungdal Choi , Sunghoi Hur , Kwang Soo Seol , Dohyun Lee
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Myers Bigel Sibley & Sajovec, PA
- 优先权: KR10-2010-0001757 20100108
- 主分类号: H01L29/788
- IPC分类号: H01L29/788 ; H01L29/792
摘要:
Provided are nonvolatile memory devices and a method of forming the same. A tunnel insulating pattern is provided on a substrate, and a floating gate is provided on the tunnel insulating pattern. A floating gate cap having a charge trap site is provided on the floating gate, and a gate dielectric pattern is provided on the floating gate cap. A control gate is provided on the gate dielectric pattern.
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