Invention Grant
US08796791B2 Hybrid intergrated component and method for the manufacture thereof 有权
混合组合成分及其制造方法

Hybrid intergrated component and method for the manufacture thereof
Abstract:
Measures are proposed by which the design freedom is significantly increased in the case of the implementation of the micromechanical structure of the MEMS element of a component, which includes a carrier for the MEMS element and a cap for the micromechanical structure of the MEMS element, the MEMS element being mounted on the carrier via a standoff structure. The MEMS element is implemented in a layered structure, and the micromechanical structure of the MEMS element extends over at least two functional layers of this layered structure, which are separated from one another by at least one intermediate layer.
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