发明授权
- 专利标题： Substrate cartridge, substrate processing apparatus, substrate processing system, control apparatus, and method of manufacturing display element
- 专利标题（中）： 基板盒，基板处理装置，基板处理系统，控制装置以及显示元件的制造方法
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申请号： US12876842申请日： 2010-09-07
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公开(公告)号： US08801307B2公开(公告)日： 2014-08-12
- 发明人: Tohru Kiuchi
- 申请人： Tohru Kiuchi
- 申请人地址： JP Tokyo
- 专利权人： Nikon Corporation
- 当前专利权人： Nikon Corporation
- 当前专利权人地址： JP Tokyo
- 代理机构： Finnegan, Henderson, Farabow, Garrett & Dunner, LLP
- 优先权： JPP2009-219953 20090925
- 主分类号： B41J15/00
- IPC分类号： B41J15/00 ; H01L21/67
摘要：
In order to provide a substrate cartridge, a substrate processing apparatus, a substrate processing system, a control apparatus, and a method of manufacturing a display element capable of preventing foreign objects from being attached to the substrate, there is provided a substrate cartridge including: a cartridge mainframe that has an opening which a substrate is carried in/out and accommodates the substrate through the opening; a mount portion that is provided in the cartridge mainframe and is detachably connected to an external connecting portion; and a blocking unit that blocks the opening depending on a connection state between the mount portion and an external connecting portion.
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