发明授权
- 专利标题： Method and system for high-throughput deposition of patterned organic thin films
- 专利标题（中）： 图案化有机薄膜高通量沉积的方法和系统
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申请号： US12874368申请日： 2010-09-02
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公开(公告)号： US08801856B2公开(公告)日： 2014-08-12
- 发明人: Paul E. Burrows , Jeffrey Silvernail , Julie J. Brown
- 申请人： Paul E. Burrows , Jeffrey Silvernail , Julie J. Brown
- 申请人地址： US NJ Ewing
- 专利权人： Universal Display Corporation
- 当前专利权人： Universal Display Corporation
- 当前专利权人地址： US NJ Ewing
- 代理机构： Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号： C23C16/00
- IPC分类号： C23C16/00 ; C23C16/52 ; H01L21/312
摘要：
High-throughput OVJP systems and methods are provided that may use multiple flow paths having different conductances to enable deposition with relatively short lag times. A high-throughput OVJP system may include a flow tube having a cross-sectional area much larger than the diameter of one or more apertures through which source material may be expelled during deposition. Use of such a configuration may allow for deposition with reduced lag times.
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