发明授权
US08802488B2 Substrate depositing system and depositing method using the same 有权
基板沉积系统及其沉积方法

Substrate depositing system and depositing method using the same
摘要:
A substrate depositing system and a method of using a substrate depositing system. A substrate depositing system includes a load-lock chamber for loading and unloading a substrate, at least one transfer chamber connected to the load-lock chamber and including a substrate transfer device configured to vertically transfer the substrate, and a pair of depositing chambers connected to opposite sides of the at least one transfer chamber and including a depositing source and a pair of substrate fixing devices, the substrate transfer device including a pair of substrate installing members.
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