发明授权
- 专利标题: Substrate depositing system and depositing method using the same
- 专利标题(中): 基板沉积系统及其沉积方法
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申请号: US13179350申请日: 2011-07-08
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公开(公告)号: US08802488B2公开(公告)日: 2014-08-12
- 发明人: Jeong-Ho Yi , Suk-Won Jung , Seung-Ho Choi
- 申请人: Jeong-Ho Yi , Suk-Won Jung , Seung-Ho Choi
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: Christie, Parker & Hale, LLP
- 优先权: KR10-2010-0090597 20100915
- 主分类号: H01L51/40
- IPC分类号: H01L51/40 ; C23C16/00
摘要:
A substrate depositing system and a method of using a substrate depositing system. A substrate depositing system includes a load-lock chamber for loading and unloading a substrate, at least one transfer chamber connected to the load-lock chamber and including a substrate transfer device configured to vertically transfer the substrate, and a pair of depositing chambers connected to opposite sides of the at least one transfer chamber and including a depositing source and a pair of substrate fixing devices, the substrate transfer device including a pair of substrate installing members.
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