发明授权
US08809151B2 Transistor comprising an embedded sigma shaped sequentially formed semiconductor alloy
有权
晶体管包括嵌入式西格玛顺序形成的半导体合金
- 专利标题: Transistor comprising an embedded sigma shaped sequentially formed semiconductor alloy
- 专利标题(中): 晶体管包括嵌入式西格玛顺序形成的半导体合金
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申请号: US13232571申请日: 2011-09-14
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公开(公告)号: US08809151B2公开(公告)日: 2014-08-19
- 发明人: Stefan Flachowsky , Stephan-Detlef Kronholz , Jan Hoentschel , Thilo Scheiper
- 申请人: Stefan Flachowsky , Stephan-Detlef Kronholz , Jan Hoentschel , Thilo Scheiper
- 申请人地址: KY Grand Cayman
- 专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人: GLOBALFOUNDRIES Inc.
- 当前专利权人地址: KY Grand Cayman
- 代理机构: Amerson Law Firm, PLLC
- 优先权: DE102010064282 20101228
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L29/78 ; H01L29/66 ; H01L29/165
摘要:
In sophisticated transistors, a specifically designed semiconductor material, such as a strain-inducing semiconductor material, may be sequentially provided in the drain region and the source region, thereby enabling a significant degree of lateral extension of the grown semiconductor materials without jeopardizing mechanical integrity of the transistor during the processing thereof. For example, semiconductor devices having different drain and source sides may be provided on the basis of sequentially provided embedded semiconductor materials.
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