Invention Grant
US08809184B2 Methods of forming contacts for semiconductor devices using a local interconnect processing scheme
有权
使用局部互连处理方案形成用于半导体器件的触点的方法
- Patent Title: Methods of forming contacts for semiconductor devices using a local interconnect processing scheme
- Patent Title (中): 使用局部互连处理方案形成用于半导体器件的触点的方法
-
Application No.: US13465633Application Date: 2012-05-07
-
Publication No.: US08809184B2Publication Date: 2014-08-19
- Inventor: Lei Yuan , Jin Cho , Jongwook Kye , Harry J. Levinson
- Applicant: Lei Yuan , Jin Cho , Jongwook Kye , Harry J. Levinson
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/762
- IPC: H01L21/762 ; H01L21/768 ; H01L21/8238 ; H01L21/441 ; H01L23/535

Abstract:
One method disclosed herein includes forming a plurality of source/drain contacts that are conductively coupled to a source/drain region of a plurality of transistor devices, wherein at least one of the source/drain contacts is a local interconnect structure that spans the isolation region and is conductively coupled to a first source/drain region in a first active region and to a second source/drain region in a second active region, and forming a patterned mask layer that covers the first and second active regions and exposes at least a portion of the local interconnect structure positioned above an isolation region that separates the first and second active regions. The method further includes performing an etching process through the patterned mask layer to remove a portion of the local interconnect structure, thereby defining a recess positioned above a remaining portion of the local interconnect structure, and forming an insulating material in the recess.
Public/Granted literature
- US20130295756A1 METHODS OF FORMING CONTACTS FOR SEMICONDUCTOR DEVICES USING A LOCAL INTERCONNECT PROCESSING SCHEME Public/Granted day:2013-11-07
Information query
IPC分类: