发明授权
- 专利标题: Apparatus and methods for brush and pad conditioning
- 专利标题(中): 刷和垫调节的装置和方法
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申请号: US13897008申请日: 2013-05-17
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公开(公告)号: US08813293B2公开(公告)日: 2014-08-26
- 发明人: Sen-Hou Ko , Lakshmanan Karuppiah
- 申请人: Sen-Hou Ko , Lakshmanan Karuppiah
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Patterson & Sheridan, LLP
- 主分类号: A46B13/00
- IPC分类号: A46B13/00 ; B08B11/00
摘要:
A method and apparatus for conditioning a processing surface of a cylindrical roller disposed in a brush box is described. In one embodiment, a brush box is described. The brush box includes a tank having an interior volume and a pair of cylindrical rollers at least partially disposed in the interior volume, each of the cylindrical rollers being rotatable about a respective axis, an actuator assembly coupled to each of the cylindrical rollers to move the respective cylindrical roller between a first position where the cylindrical rollers are in proximity and a second position where the cylindrical rollers are spaced away from each other, and a conditioning device for each of the cylindrical rollers, each conditioning device including a conditioner disposed in the interior volume, the conditioner contacting an outer surface of each of the cylindrical rollers when the rollers are in the second position.
公开/授权文献
- US20130247314A1 APPARATUS AND METHODS FOR BRUSH AND PAD CONDITIONING 公开/授权日:2013-09-26
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