发明授权
US08816403B2 Efficient semiconductor device cell layout utilizing underlying local connective features
有权
利用潜在的本地连接特征的高效半导体器件单元布局
- 专利标题: Efficient semiconductor device cell layout utilizing underlying local connective features
- 专利标题(中): 利用潜在的本地连接特征的高效半导体器件单元布局
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申请号: US13238294申请日: 2011-09-21
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公开(公告)号: US08816403B2公开(公告)日: 2014-08-26
- 发明人: Jung-Hsuan Chen , May Chang , Chiting Cheng , Li-Chun Tien
- 申请人: Jung-Hsuan Chen , May Chang , Chiting Cheng , Li-Chun Tien
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Duane Morris LLP
- 主分类号: H01L27/118
- IPC分类号: H01L27/118 ; H01L23/522
摘要:
Provided are semiconductor device cells, methods for forming the semiconductor device cells and a layout style for the semiconductor device cells. The device cells may be repetitive cells used throughout an integrated circuit. The layout style utilizes an area at the polysilicon level that is void of polysilicon and which can accommodate conductive leads therein or thereover. The conductive leads are formed of material typically used for contacts or vias and are disposed beneath the first metal interconnect level which couples device cells to one another. The subjacent local conductive leads may form subjacent signal lines allowing for additional power mesh lines to be included within the limited number of metal tracks that can be accommodated within a device cell and in accordance with metal track design spacing rules.
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