Invention Grant
- Patent Title: Optical device and exposure apparatus including the same
- Patent Title (中): 光学装置和包括其的曝光装置
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Application No.: US13180776Application Date: 2011-07-12
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Publication No.: US08817234B2Publication Date: 2014-08-26
- Inventor: Jin Choi , Byung-gook Kim
- Applicant: Jin Choi , Byung-gook Kim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Lee & Morse, P.C.
- Priority: KR10-2010-0067472 20100713
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; G02B27/42 ; G02B27/09 ; G02B3/00

Abstract:
An optical device for splitting a single beam to a plurality of beams and an exposure apparatus including the optical device are disclosed. The optical device includes a first DOE lens array including a plurality of first diffractive optical element (DOE) lenses that are two-dimensionally arranged on a first plane and a second lens array including a plurality of second DOE lenses arranged on a second plane parallel to the first plane so as to respectively correspond to the plurality of first DOE lenses. The first DOE lens array splits a first parallel beam into a plurality of second beams by condensing the first parallel beam and the second DOE lens array modifies the plurality of second beams into a plurality of third beams.
Public/Granted literature
- US20120013880A1 OPTICAL DEVICE AND EXPOSURE APPARATUS INCLUDING THE SAME Public/Granted day:2012-01-19
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