发明授权
- 专利标题： Method for manufacturing an oxide thin film
- 专利标题（中）： 氧化物薄膜的制造方法
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申请号： US13083299申请日： 2011-04-08
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公开(公告)号： US08821967B2公开(公告)日： 2014-09-02
- 发明人: Jih-Jen Wu , Wei-Ting Wu , Ching-Mei Wang , Jen-Sue Chen
- 申请人： Jih-Jen Wu , Wei-Ting Wu , Ching-Mei Wang , Jen-Sue Chen
- 申请人地址： TW Tainan
- 专利权人： National Cheng Kung University
- 当前专利权人： National Cheng Kung University
- 当前专利权人地址： TW Tainan
- 代理机构： Morris, Manning & Martin, LLP
- 代理商 Tim Tingkang Xia, Esq.
- 优先权： TW99133704A 20101004; TW99133705A 20101004; TW99133706A 20101004; TW99133707A 20101004; TW99133708A 20101004
- 主分类号： B05D5/12
- IPC分类号： B05D5/12 ; B05D3/02 ; C23C24/08 ; C23C18/12
摘要：
A method for manufacturing an oxide thin film comprises: providing a coating material composed of a first precursor material, a fuel material and a solvent; coating the coating material on a substrate; and annealing the coated coating material on the substrate to convert the coated coating material into an oxide thin film.
公开/授权文献
- US20120082782A1 METHOD FOR MANUFACTURING AN OXIDE THIN FILM 公开/授权日：2012-04-05
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