发明授权
- 专利标题: Method for manufacturing trichlorosilane
- 专利标题(中): 制备三氯硅烷的方法
-
申请号: US13533035申请日: 2012-06-26
-
公开(公告)号: US08828345B2公开(公告)日: 2014-09-09
- 发明人: Mitsutoshi Narukawa
- 申请人: Mitsutoshi Narukawa
- 申请人地址: JP Tokyo
- 专利权人: Mitsubishi Materials Corporation
- 当前专利权人: Mitsubishi Materials Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Edwards Wildman Palmer LLP
- 优先权: JP2011-143123 20110628
- 主分类号: C01B33/00
- IPC分类号: C01B33/00 ; C01B33/08 ; C01B33/04 ; C01B33/02
摘要:
This method for manufacturing trichlorosilane, includes: reacting metallurgical grade silicon with silicon tetrachloride and hydrogen so as to obtain a reaction gas; condensing the reaction gas so as to obtain a condensate; and distilling the condensate using a distillation system including a first distillation column and a secondary distillation column so as to refine trichlorosilane. While maintaining the condensate in a high temperature state so that a concentration of aluminum chloride in the condensate becomes in a range of a saturation solubility or less, the condensate flows to the first distillation column. A liquid distilled in the first distillation column is distilled by the secondary distillation column so as to refine trichlorosilane. A liquid in which aluminum chloride is concentrated is extracted from a bottom portion of the first distillation column. The extracted liquid is concentrated and dried, and then aluminum chloride is exhausted.
公开/授权文献
- US20130004404A1 METHOD FOR MANUFACTURING TRICHLOROSILANE 公开/授权日:2013-01-03
信息查询