Invention Grant
- Patent Title: Semiconductor die assemblies, semiconductor devices including same, and methods of fabrication
- Patent Title (中): 半导体管芯组件,包括其的半导体器件和制造方法
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Application No.: US14029187Application Date: 2013-09-17
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Publication No.: US08828798B2Publication Date: 2014-09-09
- Inventor: Luke G. England , Paul A. Silvestri , Michel Koopmans
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L21/50
- IPC: H01L21/50 ; H01L21/48 ; H01L21/66 ; H01L21/44 ; H01L23/00 ; H01L21/56 ; H01L25/00 ; H01L25/065 ; H01L21/683 ; H01L25/18 ; H01L23/31

Abstract:
Methods of fabricating multi-die assemblies including a wafer segment having no integrated circuitry thereon and having a plurality of vertically stacked dice thereon electrically interconnected by conductive through vias, resulting multi-die assemblies, and semiconductor devices comprising such multi-die assemblies. The wafer segment may function as a heat sink to enhance heat transfer from the stacked dice in the resulting multi-die assembly. The die stacks are fabricated at the wafer level on a base wafer, from which the wafer segment and die stacks are singulated after at least peripheral encapsulation.
Public/Granted literature
- US20140017823A1 SEMICONDUCTOR DIE ASSEMBLIES, SEMICONDUCTOR DEVICES INCLUDING SAME, AND METHODS OF FABRICATION Public/Granted day:2014-01-16
Information query
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