发明授权
US08835200B2 High light extraction efficiency nitride based light emitting diode by surface roughening 有权
高光提取效率氮化物基发光二极管通过表面粗糙化

High light extraction efficiency nitride based light emitting diode by surface roughening
摘要:
A III-nitride light emitting diode (LED) and method of fabricating the same, wherein at least one surface of a semipolar or nonpolar plane of a III-nitride layer of the LED is textured, thereby forming a textured surface in order to increase light extraction. The texturing may be performed by plasma assisted chemical etching, photolithography followed by etching, or nano-imprinting followed by etching.
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