发明授权
US08835200B2 High light extraction efficiency nitride based light emitting diode by surface roughening
有权
高光提取效率氮化物基发光二极管通过表面粗糙化
- 专利标题: High light extraction efficiency nitride based light emitting diode by surface roughening
- 专利标题(中): 高光提取效率氮化物基发光二极管通过表面粗糙化
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申请号: US13349342申请日: 2012-01-12
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公开(公告)号: US08835200B2公开(公告)日: 2014-09-16
- 发明人: Hong Zhong , Anurag Tyagi , Kenneth J. Vampola , James S. Speck , Steven P. DenBaars , Shuji Nakamura
- 申请人: Hong Zhong , Anurag Tyagi , Kenneth J. Vampola , James S. Speck , Steven P. DenBaars , Shuji Nakamura
- 申请人地址: US CA Oakland
- 专利权人: The Regents of the University of California
- 当前专利权人: The Regents of the University of California
- 当前专利权人地址: US CA Oakland
- 代理机构: Gates & Cooper LLP
- 主分类号: H01L33/32
- IPC分类号: H01L33/32 ; H01L21/02
摘要:
A III-nitride light emitting diode (LED) and method of fabricating the same, wherein at least one surface of a semipolar or nonpolar plane of a III-nitride layer of the LED is textured, thereby forming a textured surface in order to increase light extraction. The texturing may be performed by plasma assisted chemical etching, photolithography followed by etching, or nano-imprinting followed by etching.
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