发明授权
- 专利标题: Integrated circuits with resistors and methods of forming the same
- 专利标题(中): 具有电阻器的集成电路及其形成方法
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申请号: US13035533申请日: 2011-02-25
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公开(公告)号: US08835246B2公开(公告)日: 2014-09-16
- 发明人: Chan-Hong Chern , Fu-Lung Hsueh
- 申请人: Chan-Hong Chern , Fu-Lung Hsueh
- 申请人地址: TW
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW
- 代理机构: Lowe Hauptman & Ham, LLP
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L27/06
摘要:
A method of forming an integrated circuit includes forming at least one transistor over a substrate. The at least one transistor includes a first gate dielectric structure disposed over a substrate. A work-function metallic layer is disposed over the first gate dielectric structure. A conductive layer is disposed over the work-function metallic layer. A source/drain (S/D) region is disposed adjacent to each sidewall of the first gate dielectric structure. At least one resistor structure is formed over the substrate. The at least one resistor structure includes a first doped semiconductor layer disposed over the substrate. The at least one resistor structure does not include any work-function metallic layer between the first doped semiconductor layer and the substrate.
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