Invention Grant
- Patent Title: Integrated circuits with resistors and methods of forming the same
- Patent Title (中): 具有电阻器的集成电路及其形成方法
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Application No.: US13035533Application Date: 2011-02-25
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Publication No.: US08835246B2Publication Date: 2014-09-16
- Inventor: Chan-Hong Chern , Fu-Lung Hsueh
- Applicant: Chan-Hong Chern , Fu-Lung Hsueh
- Applicant Address: TW
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW
- Agency: Lowe Hauptman & Ham, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L27/06

Abstract:
A method of forming an integrated circuit includes forming at least one transistor over a substrate. The at least one transistor includes a first gate dielectric structure disposed over a substrate. A work-function metallic layer is disposed over the first gate dielectric structure. A conductive layer is disposed over the work-function metallic layer. A source/drain (S/D) region is disposed adjacent to each sidewall of the first gate dielectric structure. At least one resistor structure is formed over the substrate. The at least one resistor structure includes a first doped semiconductor layer disposed over the substrate. The at least one resistor structure does not include any work-function metallic layer between the first doped semiconductor layer and the substrate.
Public/Granted literature
- US20120217586A1 INTEGRATED CIRCUITS WITH RESISTORS AND METHODS OF FORMING THE SAME Public/Granted day:2012-08-30
Information query
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