Invention Grant
- Patent Title: Semiconductor storage device and method for manufacturing same
- Patent Title (中): 半导体存储装置及其制造方法
-
Application No.: US14046984Application Date: 2013-10-06
-
Publication No.: US08841646B2Publication Date: 2014-09-23
- Inventor: Yoshitaka Sasago , Akio Shima , Satoru Hanzawa , Takashi Kobayashi , Masaharu Kinoshita , Norikatsu Takaura
- Applicant: Hitachi, Ltd.
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2009-285876 20091217
- Main IPC: H01L47/00
- IPC: H01L47/00 ; H01L45/00 ; H01L27/22 ; H01L27/24

Abstract:
Disclosed are a semiconductor storage device and a manufacturing method. The storage device has: a substrate; a first word line above the substrate; a first laminated body above the first word line and having N+1 first inter-gate insulating layers and N first semiconductor layers alternately laminated; a first bit line above the laminated body and extending in a direction that intersects the first word line; a first gate insulating layer on side surfaces of the first inter-gate insulating layers and the first semiconductor layers; a first channel layer on the side surface of the first gate insulating layer; and a first variable resistance material layer on the side surface of the first channel layer. The first variable resistance material layer is in a region where the first word line and the first bit line intersect. A polysilicon diode is used as a selection element.
Public/Granted literature
- US20140103287A1 SEMICONDUCTOR STORAGE DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2014-04-17
Information query
IPC分类: