发明授权
- 专利标题: Acoustic wave device
- 专利标题(中): 声波装置
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申请号: US13240407申请日: 2011-09-22
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公开(公告)号: US08841819B2公开(公告)日: 2014-09-23
- 发明人: Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita
- 申请人: Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Takeshi Sakashita
- 申请人地址: JP Tokyo
- 专利权人: Taiyo Yuden Co., Ltd.
- 当前专利权人: Taiyo Yuden Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Chen Yoshimura LLP
- 优先权: JP2010-245452 20101101
- 主分类号: H03H9/54
- IPC分类号: H03H9/54 ; H01L41/09 ; H03H9/58
摘要:
An acoustic wave device includes: a first piezoelectric thin film resonator including a first lower electrode, a first upper electrode and a first piezoelectric film sandwiched between the first lower and upper electrodes; a decoupler film provided on the first upper electrode; and a second piezoelectric thin film resonator provided on the decoupler film and including a second lower electrode, a second upper electrode and a second piezoelectric film sandwiched between the second lower and upper electrodes, wherein the first piezoelectric film and the second piezoelectric film comprise aluminum nitride and include an element increasing a piezoelectric constant of the aluminum nitride.
公开/授权文献
- US20120104900A1 ACOUSTIC WAVE DEVICE 公开/授权日:2012-05-03
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