- 专利标题: Tapered via and MIM capacitor
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申请号: US14176460申请日: 2014-02-10
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公开(公告)号: US08842412B2公开(公告)日: 2014-09-23
- 发明人: James S. Dunn , Zhong-Xiang He , Anthony K. Stamper
- 申请人: James S. Dunn , Zhong-Xiang He , Anthony K. Stamper
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理商 Anthony J. Canale; Robert M. Trepp
- 主分类号: H01G4/30
- IPC分类号: H01G4/30 ; H01L49/02
摘要:
A chip capacitor and interconnecting wiring is described incorporating a metal insulator metal (MIM) capacitor, tapered vias and vias coupled to one or both of the top and bottom electrodes of the capacitor in an integrated circuit. A design structure tangibly embodied in a machine readable medium is described incorporating computer readable code defining a MIM capacitor, tapered vias, vias and wiring levels in an integrated circuit.
公开/授权文献
- US20140151851A1 TAPERED VIA AND MIM CAPACITOR 公开/授权日:2014-06-05
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