Invention Grant
US08854712B2 Display device provided with MEMS light valve and forming method thereof 有权
具有MEMS光阀的显示装置及其形成方法

Display device provided with MEMS light valve and forming method thereof
Abstract:
A display device provided with an MEMS light valve, comprising: a substrate, a fixed optical grating located on the substrate, an MEMS light valve for controlling the opening and closing of the fixed optical grating, the MEMS light valve comprises a first light valve and a second light valve; the opening and closing of the fixed optical grating is controlled via controlling the movement of the first light valve and the second light valve, and the moving directions of the first light valve and the second light valve are opposite. Also disclosed is a method for forming a display device provided with an MEMS light valve. Thus the sensitivity of the MEMS light valve is improved.
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