- 专利标题: Integrated cross-tester analysis and real-time adaptive test
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申请号: US12871429申请日: 2010-08-30
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公开(公告)号: US08855959B2公开(公告)日: 2014-10-07
- 发明人: Mark C. Johnson , Deepak S. Turaga , Olivier Verscheure
- 申请人: Mark C. Johnson , Deepak S. Turaga , Olivier Verscheure
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 代理机构: Scully, Scott, Murphy & Presser, P.C.
- 代理商 William Stock, Esq.
- 主分类号: G01D3/00
- IPC分类号: G01D3/00 ; G01P21/00 ; G01R31/319
摘要:
Processing test results from a plurality of individual semiconductor testers by analyzing each test result at an adaptive test engine. A centralized system jointly analyzes all the test results from the plurality of individual semiconductor testers. The adaptive test engine or the centralized system identifies, based on the analysis of each test result or the joint analysis of all the test results, one or more of: a test environmental issue, a tester variability issue, a tester calibration issue, a product variability issue, and a manufacturing process variability issue. The adaptive test engine or the centralized system determines whether one or more of the plurality of individual semiconductor testers causes one or more of the identified issues or whether semiconductor products tested by the plurality of individual semiconductor testers causes one or more of the identified issues.
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