Invention Grant
US08858745B2 Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
有权
用于粘接暴露于等离子体的陶瓷部件的耐腐蚀粘合剂
- Patent Title: Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas
- Patent Title (中): 用于粘接暴露于等离子体的陶瓷部件的耐腐蚀粘合剂
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Application No.: US12291747Application Date: 2008-11-12
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Publication No.: US08858745B2Publication Date: 2014-10-14
- Inventor: Jennifer Y. Sun , Ren-Guan Duan , Kenneth S. Collins
- Applicant: Jennifer Y. Sun , Ren-Guan Duan , Kenneth S. Collins
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agent Shirley L. Church, Esq.
- Main IPC: C03B29/00
- IPC: C03B29/00 ; C04B37/00 ; C03C3/247 ; C03C3/32 ; C04B35/119 ; C03C8/24 ; B32B17/06 ; C04B9/02 ; H01L21/67
Abstract:
Embodiments of the invention relate to component structures which are useful as apparatus in plasma processing chambers. Portions of the component structures are bonded together using oxyfluoride-comprising glazes, glass ceramics, and combinations thereof. The bonding material is resistant to halogen-containing plasmas and exhibits desirable mechanical properties.
Public/Granted literature
- US20100119844A1 Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas Public/Granted day:2010-05-13
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