发明授权
US08858908B2 Method for producing N-type group III nitride single crystal, N-type group III nitride single crystal, and crystal substrate
有权
制造N型III族氮化物单晶,N型III族氮化物单晶和晶体衬底的方法
- 专利标题: Method for producing N-type group III nitride single crystal, N-type group III nitride single crystal, and crystal substrate
- 专利标题(中): 制造N型III族氮化物单晶,N型III族氮化物单晶和晶体衬底的方法
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申请号: US13220939申请日: 2011-08-30
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公开(公告)号: US08858908B2公开(公告)日: 2014-10-14
- 发明人: Hirokazu Iwata
- 申请人: Hirokazu Iwata
- 申请人地址: JP Tokyo
- 专利权人: Ricoh Company, Ltd.
- 当前专利权人: Ricoh Company, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Cooper & Dunham LLP
- 优先权: JP2010-194552 20100831; JP2011-151093 20110707
- 主分类号: C01B15/12
- IPC分类号: C01B15/12 ; C01B17/66 ; C01B21/06 ; C23F11/04 ; H01B1/02 ; C30B9/00 ; C30B13/00 ; C30B15/00 ; C30B29/40 ; C30B9/10 ; H01B1/06 ; C30B29/38
摘要:
A method of producing an n-type group III nitride single crystal includes putting raw materials that include at least a substance including a group III element, an alkali metal, and boron oxide into a reaction vessel; melting the boron oxide by heating the reaction vessel to a melting point of the boron oxide; forming a mixed melt which includes the group III element, the alkali metal, and the boron oxide, in the reaction vessel by heating the reaction vessel to a crystal growth temperature of a group III nitride; dissolving nitrogen into the mixed melt by bringing a nitrogen-containing gas into contact with the mixed melt; and growing an n-type group III nitride single crystal, which is doped with oxygen as a donor, from the group III element, the nitrogen, and oxygen in the boron oxide that are dissolved in the mixed melt.
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