发明授权
US08859043B2 Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
有权
有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法
- 专利标题: Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
- 专利标题(中): 有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法
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申请号: US13468835申请日: 2012-05-10
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公开(公告)号: US08859043B2公开(公告)日: 2014-10-14
- 发明人: Dong-Kyu Lee , Mu-Hyun Kim , Young-Rok Song , Sang-Pil Lee , Jung-Bae Song , Jong-Heon Kim , Byung-Su Kim , Yun-Mi Lee , Jae-Kwang Ryu
- 申请人: Dong-Kyu Lee , Mu-Hyun Kim , Young-Rok Song , Sang-Pil Lee , Jung-Bae Song , Jong-Heon Kim , Byung-Su Kim , Yun-Mi Lee , Jae-Kwang Ryu
- 申请人地址: KR Yongin-si
- 专利权人: Samsung Display Co., Ltd.
- 当前专利权人: Samsung Display Co., Ltd.
- 当前专利权人地址: KR Yongin-si
- 代理机构: Christie, Parker & Hale, LLP
- 优先权: KR10-2011-0049792 20110525
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; H01L33/08 ; C23C14/12 ; C23C14/04 ; C23C14/24
摘要:
An organic layer deposition apparatus for forming an organic layer on a substrate includes: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; and a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits and at least one spacer arranged between a pair of adjacent patterning slits of the plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and at least one of the substrate or the organic layer deposition apparatus is movable relative to the other.
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