发明授权
US08859043B2 Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same 有权
有机层沉积装置及使用该有机发光显示装置的有机发光显示装置的制造方法

Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same
摘要:
An organic layer deposition apparatus for forming an organic layer on a substrate includes: a deposition source configured to discharge a deposition material; a deposition source nozzle unit arranged at a side of the deposition source and including a plurality of deposition source nozzles; and a patterning slit sheet facing the deposition source nozzle unit and including a plurality of patterning slits and at least one spacer arranged between a pair of adjacent patterning slits of the plurality of patterning slits, the patterning slit sheet being smaller than the substrate in at least one of a first direction or a second direction perpendicular to the first direction, and the substrate is spaced apart from the organic layer deposition apparatus by a predetermined distance, and at least one of the substrate or the organic layer deposition apparatus is movable relative to the other.
信息查询
0/0