发明授权
- 专利标题: Interferometer
- 专利标题(中): 干涉仪
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申请号: US13150825申请日: 2011-06-01
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公开(公告)号: US08860949B2公开(公告)日: 2014-10-14
- 发明人: Ko Ishizuka , Ryo Sasaki , Koichi Masegi
- 申请人: Ko Ishizuka , Ryo Sasaki , Koichi Masegi
- 申请人地址: JP
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP
- 代理机构: Rossi, Kimms & McDowell LLP
- 优先权: JP2010-128276 20100603
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01D5/26
摘要:
An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.
公开/授权文献
- US20110299093A1 INTERFEROMETER 公开/授权日:2011-12-08