摘要:
The present invention provides a measurement apparatus which measures a height of a test surface, the apparatus including an image sensing device including a plurality of detection units configured to detect interfering light formed by measurement light from the test surface and reference light from a reference surface, and an optical system configured to guide measurement light beams, reflected at a plurality of measurement points on the test surface, and reference light beams, reflected at a plurality of reference points on the reference surface, to the plurality of detection units, respectively, wherein the reference surface generates differences among optical path differences between the measurement light beams and the reference light beams which enter the plurality of detection units, respectively.
摘要:
An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.
摘要:
An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.
摘要:
A voice communication system transfers voice information stored in a protocol data unit under a predetermined communication protocol over a network, and includes end voice terminals for transferring and receiving the voice information, and a management server for managing said end voice terminal. The management server includes a manager for storing subscriber information indicative of whether or not the end voice terminals are provided with the capability of predetermined broadband voice communication. A user is informed, at the latest before the user initiates a call from the end voice terminal, of whether or not a telephone set of a called party is provided with the capability of the broadband voice communication through the end voice terminal based on the subscriber information. running in a network under a predetermined communication. This increases the satisfaction of the user and allows a business model justifying charging customers to be built.
摘要:
A wafer surface level detection method includes a first level measurement step of measuring a level of a surface of a substrate having a plurality of shot regions, a position measurement step of measuring a position along the surface of the substrate, a first movement step of moving the substrate in at least a vertical direction on the basis of the measurement result obtained in the first level measurement step and the measurement result obtained in the position measurement step, and a second level measurement step of measuring the level of the surface of the substrate after the first movement step, wherein each of the plurality of shot regions has a measurement region. In the first movement step, the substrate is moved such that a relative position of the measurement region of each of the plurality of shot regions and each of the plurality of shot regions along the surface is constant, and, in the second level measurement step, the measurement region of each of the plurality of shot regions is measured.
摘要:
A shape measuring method for measuring a surface shape of a measurement target includes dividing light from a light source into measurement light and reference light, the measurement light being obliquely incident upon a surface of the measurement target, the reference light being incident upon a reference mirror, introducing the measurement light reflected by the measurement target and the reference light reflected by the reference mirror to a photoelectric conversion element, detecting interference light formed by the measurement light and the reference light by the photoelectric conversion element while moving the measurement target, and measuring the surface shape of the measurement target based on an interference signal obtained from the measurement light that has been reflected at the same position on the surface of the measurement target.
摘要:
The present invention is a multi-terminal connector in which an insertion body can be inserted or removed. The insertion body is connected to or disconnected from an internal terminal connection part. With the insertion or removal of the insertion body, a shutter inside an insertion opening opens or closes and a lock spring moves up and down. The lock spring includes a base affixed to the top surface of a housing and a flat spring part extending from both sides of the base. The flat spring part includes a protruding part and a latching surface protruding inward. The protruding part is bent downward and protrudes to the inside of the insertion opening through a cut-out in the housing. As a result, an internal terminal is protected by preventing the insertion of an incompatible insertion body, while reducing the extended areas on both sides to achieve a smaller size.
摘要:
The present invention provides an exposure apparatus including an obtaining unit configured to obtain data of a first imaging position at which light from a first pattern having, as a longitudinal direction thereof, a first direction perpendicular to an optical axis of a projection optical system forms an image via the projection optical system, and data of a second imaging position at which light from a second pattern having, as a longitudinal direction thereof, a second direction which is not parallel to the first direction and is perpendicular to the optical axis forms an image via the projection optical system, when the first pattern and the second pattern are respectively placed on an object plane of the projection optical system, and a control unit configured to control a stage so that a substrate is positioned at a target position of the substrate along the optical axis.
摘要:
Provided are a counter electrode, which is excellent in electrolytic solution resistance and electrical conductivity, and which is capable of corresponding to an application process carried out by pattern printing during a manufacturing process, a photoelectric conversion element using the counter electrode, and a method for manufacturing the same. A dye-sensitized photoelectric conversion element has a structure in which an electrolyte layer is filled between a porous electrode to which a photosensitizing dye is adsorbed and a counter electrode. The counter electrode includes: a metal counter electrode; a conductive primer layer that contains conductive carbon, and at least one resin selected among a polyamide imide resin, a polyamide resin, and polyimide resin as a binder resin; and a catalyst layer containing conductive carbon and an inorganic binder. The metal counter electrode and the catalyst layer are formed to come into close contact with each other through the conductive primer layer.