Measurement apparatus for calculation of substrate tilt, exposure apparatus, and device fabrication method
    1.
    发明授权
    Measurement apparatus for calculation of substrate tilt, exposure apparatus, and device fabrication method 有权
    用于计算基板倾斜度的测量装置,曝光装置和装置制造方法

    公开(公告)号:US09164405B2

    公开(公告)日:2015-10-20

    申请号:US12840495

    申请日:2010-07-21

    申请人: Ryo Sasaki

    发明人: Ryo Sasaki

    摘要: The present invention provides a measurement apparatus which measures a height of a test surface, the apparatus including an image sensing device including a plurality of detection units configured to detect interfering light formed by measurement light from the test surface and reference light from a reference surface, and an optical system configured to guide measurement light beams, reflected at a plurality of measurement points on the test surface, and reference light beams, reflected at a plurality of reference points on the reference surface, to the plurality of detection units, respectively, wherein the reference surface generates differences among optical path differences between the measurement light beams and the reference light beams which enter the plurality of detection units, respectively.

    摘要翻译: 本发明提供了一种测量测试表面的高度的测量装置,该装置包括一个图像感测装置,该图像感测装置包括多个检测单元,该多个检测单元被配置为检测由来自测试表面的测量光形成的干扰光和来自参考表面的参考光, 以及光学系统,被配置为将测量表面上的多个测量点反射的测量光束和在参考表面上的多个参考点反射的参考光束分别引导到多个检测单元,其中 参考表面分别产生进入多个检测单元的测量光束和参考光束之间的光程差的差异。

    Interferometer
    2.
    发明授权
    Interferometer 有权
    干涉仪

    公开(公告)号:US08860949B2

    公开(公告)日:2014-10-14

    申请号:US13150825

    申请日:2011-06-01

    IPC分类号: G01B11/02 G01D5/26

    CPC分类号: G01D5/266

    摘要: An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.

    摘要翻译: 干涉仪通过观察通过将从光源发射的光分成两束光并产生的干涉光的强度的波动来测量待测物体的位移,并且覆盖两个光束。 所述干涉仪包括:受光单元,其包括包含多个部分区域的光接收区域,并且被配置为检测所述多个部分区域中的每一个中的干涉光; 以及处理单元,被配置为通过使用每个部分区域中的检测结果来计算指示光接收区域中的干扰光的相位分布的均匀性的指标的值。

    INTERFEROMETER
    3.
    发明申请
    INTERFEROMETER 有权
    干扰仪

    公开(公告)号:US20110299093A1

    公开(公告)日:2011-12-08

    申请号:US13150825

    申请日:2011-06-01

    IPC分类号: G01B11/02

    CPC分类号: G01D5/266

    摘要: An interferometer measures a displacement of an object to be measured by observing a fluctuation in intensity of interfering light generated by dividing light emitted from a light source into two light beams and overlaying the two light beams. The interferometer includes: a light-receiving unit including a light-receiving area including a plurality of partial areas and configured to detect the interfering light in each of the plurality of partial areas; and a processing unit configured to calculate a value of an index indicating uniformity of a phase distribution of the interfering light in the light-receiving area by using a detection result in each of the partial areas.

    摘要翻译: 干涉仪通过观察通过将从光源发射的光分成两束光并产生的干涉光的强度的波动来测量待测物体的位移,并且覆盖两个光束。 所述干涉仪包括:受光单元,其包括包含多个部分区域的光接收区域,并且被配置为检测所述多个部分区域中的每一个中的干涉光; 以及处理单元,被配置为通过使用每个部分区域中的检测结果来计算指示光接收区域中的干扰光的相位分布的均匀性的指标的值。

    Voice communication system and a server apparatus
    4.
    发明授权
    Voice communication system and a server apparatus 有权
    语音通信系统和服务器装置

    公开(公告)号:US07822014B2

    公开(公告)日:2010-10-26

    申请号:US10579677

    申请日:2004-11-19

    IPC分类号: H04L12/66

    CPC分类号: H04M7/006

    摘要: A voice communication system transfers voice information stored in a protocol data unit under a predetermined communication protocol over a network, and includes end voice terminals for transferring and receiving the voice information, and a management server for managing said end voice terminal. The management server includes a manager for storing subscriber information indicative of whether or not the end voice terminals are provided with the capability of predetermined broadband voice communication. A user is informed, at the latest before the user initiates a call from the end voice terminal, of whether or not a telephone set of a called party is provided with the capability of the broadband voice communication through the end voice terminal based on the subscriber information. running in a network under a predetermined communication. This increases the satisfaction of the user and allows a business model justifying charging customers to be built.

    摘要翻译: 语音通信系统通过网络传送以预定通信协议存储在协议数据单元中的语音信息,并且包括用于传送和接收语音信息的终端语音终端,以及用于管理所述终端语音终端的管理服务器。 管理服务器包括用于存储指示终端语音终端是否具有预定宽带语音通信能力的用户信息的管理器。 在用户从终端语音终端发起呼叫之前,最终通知用户通过终端语音终端基于该用户是否向被叫方的电话机提供宽带语音通信的能力 信息。 在预定通信下在网络中运行。 这增加了用户的满意度,并允许商业模式证明为客户建立收费。

    Surface level detection method, exposure apparatus, and device manufacturing method
    5.
    发明授权
    Surface level detection method, exposure apparatus, and device manufacturing method 失效
    表面等级检测方法,曝光装置和装置制造方法

    公开(公告)号:US07701553B2

    公开(公告)日:2010-04-20

    申请号:US11846996

    申请日:2007-08-29

    申请人: Ryo Sasaki

    发明人: Ryo Sasaki

    IPC分类号: G03B27/52 G03B27/42

    摘要: A wafer surface level detection method includes a first level measurement step of measuring a level of a surface of a substrate having a plurality of shot regions, a position measurement step of measuring a position along the surface of the substrate, a first movement step of moving the substrate in at least a vertical direction on the basis of the measurement result obtained in the first level measurement step and the measurement result obtained in the position measurement step, and a second level measurement step of measuring the level of the surface of the substrate after the first movement step, wherein each of the plurality of shot regions has a measurement region. In the first movement step, the substrate is moved such that a relative position of the measurement region of each of the plurality of shot regions and each of the plurality of shot regions along the surface is constant, and, in the second level measurement step, the measurement region of each of the plurality of shot regions is measured.

    摘要翻译: 晶片表面电平检测方法包括测量具有多个照射区域的基板的表面的水平的第一电平测量步骤,测量沿着基板的表面的位置的位置测量步骤,移动的第一移动步骤 基于在第一水平测量步骤中获得的测量结果和在位置测量步骤中获得的测量结果,至少在垂直方向上的衬底,以及第二水平测量步骤,用于测量衬底的表面的水平, 第一移动步骤,其中多个拍摄区域中的每一个具有测量区域。 在第一移动步骤中,基板被移动,使得多个拍摄区域中的每一个的测量区域和沿着该表面的多个照射区域中的每一个的相对位置是恒定的,并且在第二水平测量步骤中, 测量多个拍摄区域中的每一个的测量区域。

    SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APPARATUS
    6.
    发明申请
    SHAPE MEASURING APPARATUS, SHAPE MEASURING METHOD, AND EXPOSURE APPARATUS 有权
    形状测量装置,形状测量方法和曝光装置

    公开(公告)号:US20080151258A1

    公开(公告)日:2008-06-26

    申请号:US11942348

    申请日:2007-11-19

    IPC分类号: G01B9/023

    摘要: A shape measuring method for measuring a surface shape of a measurement target includes dividing light from a light source into measurement light and reference light, the measurement light being obliquely incident upon a surface of the measurement target, the reference light being incident upon a reference mirror, introducing the measurement light reflected by the measurement target and the reference light reflected by the reference mirror to a photoelectric conversion element, detecting interference light formed by the measurement light and the reference light by the photoelectric conversion element while moving the measurement target, and measuring the surface shape of the measurement target based on an interference signal obtained from the measurement light that has been reflected at the same position on the surface of the measurement target.

    摘要翻译: 用于测量测量对象的表面形状的形状测量方法包括将来自光源的光分成测量光和参考光,测量光倾斜地入射到测量对象的表面上,参考光入射到参考反射镜 将由测量对象反射的测量光和由参考反射镜反射的参考光引入光电转换元件,在移动测量目标的同时检测由光电转换元件测量的光和参考光形成的干涉光,并测量 基于从已经在测量对象的表面上的相同位置反射的测量光获得的干涉信号来测量目标的表面形状。

    Multiple terminal connector
    7.
    发明申请
    Multiple terminal connector 审中-公开
    多端子连接器

    公开(公告)号:US20060030184A1

    公开(公告)日:2006-02-09

    申请号:US11178078

    申请日:2005-07-08

    申请人: Ryo Sasaki

    发明人: Ryo Sasaki

    IPC分类号: H01R13/44

    摘要: The present invention is a multi-terminal connector in which an insertion body can be inserted or removed. The insertion body is connected to or disconnected from an internal terminal connection part. With the insertion or removal of the insertion body, a shutter inside an insertion opening opens or closes and a lock spring moves up and down. The lock spring includes a base affixed to the top surface of a housing and a flat spring part extending from both sides of the base. The flat spring part includes a protruding part and a latching surface protruding inward. The protruding part is bent downward and protrudes to the inside of the insertion opening through a cut-out in the housing. As a result, an internal terminal is protected by preventing the insertion of an incompatible insertion body, while reducing the extended areas on both sides to achieve a smaller size.

    摘要翻译: 本发明是可插入或取出插入体的多端子连接器。 插入体与内部端子连接部连接或断开。 随着插入体的插入或移除,插入开口内的开闭器打开或关闭,并且锁定弹簧上下移动。 锁定弹簧包括固定到壳体的顶表面的基座和从基座的两侧延伸的平板弹簧部件。 板簧部包括突出部和向内突出的卡定面。 突出部分向下弯曲并通过壳体中的切口突出到插入开口的内部。 结果,通过防止插入不兼容的插入体来保护内部端子,同时减少两侧的延伸区域以实现更小的尺寸。

    Exposure apparatus and device fabrication method
    8.
    发明授权
    Exposure apparatus and device fabrication method 有权
    曝光装置和装置制造方法

    公开(公告)号:US08810774B2

    公开(公告)日:2014-08-19

    申请号:US13178995

    申请日:2011-07-08

    IPC分类号: G03B27/53 G03F9/00

    摘要: The present invention provides an exposure apparatus including an obtaining unit configured to obtain data of a first imaging position at which light from a first pattern having, as a longitudinal direction thereof, a first direction perpendicular to an optical axis of a projection optical system forms an image via the projection optical system, and data of a second imaging position at which light from a second pattern having, as a longitudinal direction thereof, a second direction which is not parallel to the first direction and is perpendicular to the optical axis forms an image via the projection optical system, when the first pattern and the second pattern are respectively placed on an object plane of the projection optical system, and a control unit configured to control a stage so that a substrate is positioned at a target position of the substrate along the optical axis.

    摘要翻译: 本发明提供了一种曝光装置,包括:获取单元,被配置为获得第一成像位置的数据,在该第一成像位置处,来自具有垂直于投影光学系统的光轴的第一方向的第一图案的光作为其纵向方向形成 通过投影光学系统的图像和第二成像位置的数据,在该第二成像位置处,来自具有与第一方向不平行且垂直于光轴的第二方向作为其纵向方向的第二图案的光形成图像 通过投影光学系统,当第一图案和第二图案分别放置在投影光学系统的物平面上时,以及控制单元,被配置为控制基板以使得基板位于基板的目标位置 光轴。

    PHOTOELECTRIC CONVERSION ELEMENT, METHOD FOR MANUFACTURING THE SAME, ELECTRONIC APPARATUS, COUNTER ELECTRODE FOR PHOTOELECTRIC CONVERSION ELEMENT, AND ARCHITECTURE
    9.
    发明申请
    PHOTOELECTRIC CONVERSION ELEMENT, METHOD FOR MANUFACTURING THE SAME, ELECTRONIC APPARATUS, COUNTER ELECTRODE FOR PHOTOELECTRIC CONVERSION ELEMENT, AND ARCHITECTURE 审中-公开
    光电转换元件,其制造方法,电子设备,光电转换元件的计数器电极和结构

    公开(公告)号:US20140174524A1

    公开(公告)日:2014-06-26

    申请号:US14130126

    申请日:2012-06-22

    IPC分类号: H01G9/20

    摘要: Provided are a counter electrode, which is excellent in electrolytic solution resistance and electrical conductivity, and which is capable of corresponding to an application process carried out by pattern printing during a manufacturing process, a photoelectric conversion element using the counter electrode, and a method for manufacturing the same. A dye-sensitized photoelectric conversion element has a structure in which an electrolyte layer is filled between a porous electrode to which a photosensitizing dye is adsorbed and a counter electrode. The counter electrode includes: a metal counter electrode; a conductive primer layer that contains conductive carbon, and at least one resin selected among a polyamide imide resin, a polyamide resin, and polyimide resin as a binder resin; and a catalyst layer containing conductive carbon and an inorganic binder. The metal counter electrode and the catalyst layer are formed to come into close contact with each other through the conductive primer layer.

    摘要翻译: 提供了一种对电极,其电解溶液电阻和电导率优异,并且能够对应于在制造过程中通过图案印刷进行的涂布工艺,使用对电极的光电转换元件,以及用于 制造相同。 染料敏化光电转换元件具有在吸附有感光性染料的多孔电极与对电极之间填充电解质层的结构。 对电极包括:金属对电极; 含有导电性碳的导电性底漆层和选自聚酰胺酰亚胺树脂,聚酰胺树脂和聚酰亚胺树脂中的至少一种树脂作为粘合剂树脂; 以及含有导电性碳和无机粘合剂的催化剂层。 金属对电极和催化剂层形成为通过导电底漆层彼此紧密接触。