Invention Grant
US08866080B2 Faraday cup array integrated with a readout IC and method for manufacture thereof
有权
与读出IC集成的法拉第杯阵列及其制造方法
- Patent Title: Faraday cup array integrated with a readout IC and method for manufacture thereof
- Patent Title (中): 与读出IC集成的法拉第杯阵列及其制造方法
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Application No.: US12921508Application Date: 2009-02-27
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Publication No.: US08866080B2Publication Date: 2014-10-21
- Inventor: Christopher A. Bower , Kristin Hedgepath Gilchrist , Brian R. Stoner , Dorota Temple
- Applicant: Christopher A. Bower , Kristin Hedgepath Gilchrist , Brian R. Stoner , Dorota Temple
- Applicant Address: US NC Research Triangle Park
- Assignee: Research Triangle Institute
- Current Assignee: Research Triangle Institute
- Current Assignee Address: US NC Research Triangle Park
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- International Application: PCT/US2009/035375 WO 20090227
- International Announcement: WO2009/114291 WO 20090917
- Main IPC: G01N23/00
- IPC: G01N23/00 ; H01J37/244 ; H01J49/02 ; H01J49/00

Abstract:
A detector array and method for making the detector array. The array includes a substrate including a plurality of trenches formed therein, and includes a plurality of collectors electrically isolated from each other, formed on the walls of the trenches, and configured to collect charge particles incident on respective ones of the collectors and to output from said collectors signals indicative of charged particle collection. The array includes a plurality of readout circuits disposed on a side of the substrate opposite openings to the collectors. The readout circuits are configured to read charge collection signals from respective ones of the plurality of collectors.
Public/Granted literature
- US20110031388A1 FARADAY CUP ARRAY INTEGRATED WITH A READOUT IC AND METHOD FOR MANUFACTURE THEREOF Public/Granted day:2011-02-10
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