发明授权
- 专利标题: Method for manufacturing microstructure, and method for manufacturing liquid jetting head
- 专利标题(中): 微结构的制造方法以及液体喷射头的制造方法
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申请号: US12811255申请日: 2009-03-26
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公开(公告)号: US08869401B2公开(公告)日: 2014-10-28
- 发明人: Masahiko Kubota , Satoshi Kokubo
- 申请人: Masahiko Kubota , Satoshi Kokubo
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2008-081279 20080326
- 国际申请: PCT/JP2009/056846 WO 20090326
- 国际公布: WO2009/119900 WO 20091001
- 主分类号: B21D53/76
- IPC分类号: B21D53/76 ; B23P17/00 ; H05K3/02 ; H05K3/10 ; G03C1/00 ; G03F7/00 ; B41J2/16
摘要:
A liquid ejection head or microstructure manufacturing method includes providing a substrate with an organic resin material layer for forming a flow passage wall member, and forming a flow path and ejection outlet by partly removing the organic resin material layer by illumination with a laser beam having a pulse width between 2 and 20 picosecs and having a focal point inside the organic resin material layer, with movement of the focal point of the laser beam. The ejection outlet is formed by exposure of the organic resin material to the laser beam condensed by a first lens having a numerical aperture of not less than 0.3, and the liquid flow path is formed by exposure of the organic resin material to the laser beam condensed by a second lens having a numerical aperture which is larger than that of the first lens and which is not less than 0.5.
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