发明授权
- 专利标题: Process tool chemical and gas usage optimization
- 专利标题(中): 过程工具化学和气体使用优化
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申请号: US13308124申请日: 2011-11-30
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公开(公告)号: US08874416B2公开(公告)日: 2014-10-28
- 发明人: Krishna Vepa , Parris C. M. Hawkins , Andreas Neuber
- 申请人: Krishna Vepa , Parris C. M. Hawkins , Andreas Neuber
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Blakely, Sokoloff, Taylor & Zafman LLP
- 主分类号: G06G7/48
- IPC分类号: G06G7/48 ; G05B19/418 ; G06Q10/04
摘要:
A resource usage optimization server determines a degradation caused by a first resource. The resource usage optimization server determines a cleaning caused by a second resource. The resource usage optimization server calculates a ratio of the degradation and the cleaning.
公开/授权文献
- US20120143574A1 PROCESS TOOL CHEMICAL AND GAS USAGE OPTIMIZATION 公开/授权日:2012-06-07