发明授权
- 专利标题: Method for the plasma cleaning of the surface of a material coated with an organic substance and the installation for carrying out said method
- 专利标题(中): 涂覆有机物质的材料的表面的等离子体清洗方法以及用于实施所述方法的装置
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申请号: US12631193申请日: 2009-12-04
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公开(公告)号: US08877003B2公开(公告)日: 2014-11-04
- 发明人: Eric Silberberg , Eric Michel , Francois Reniers , Claudine Buess-Herman
- 申请人: Eric Silberberg , Eric Michel , Francois Reniers , Claudine Buess-Herman
- 申请人地址: FR Puteaux
- 专利权人: Usinor
- 当前专利权人: Usinor
- 当前专利权人地址: FR Puteaux
- 代理机构: Sughrue Mion, PLLC
- 代理商 Richard C. Turner
- 优先权: FR0202057 20020219
- 主分类号: C23F1/00
- IPC分类号: C23F1/00 ; H01L21/306 ; B08B7/00 ; H01J37/32 ; C23G5/00
摘要:
The invention relates to a method of cleaning the surface of a material that is coated with an organic substance. The inventive method is characterized in that it comprises the following steps, consisting in: introducing the material into a treatment chamber, having a pressure of between 10 mbar and 1 bar therein, which is supplied with a gas stream containing at least 90 volume percent of oxygen; and generating a plasma by passing an electric discharge between the surface of the material and a dielectric-covered electrode in order to break down the organic substance under the action of the free radicals O thus produces. The invention also relates to an installation that is used to carry out said method.
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