Invention Grant
US08877572B2 Graphene device manufacturing apparatus and graphene device manufacturing method using the apparatus
有权
石墨烯装置制造装置和使用该装置的石墨烯装置制造方法
- Patent Title: Graphene device manufacturing apparatus and graphene device manufacturing method using the apparatus
- Patent Title (中): 石墨烯装置制造装置和使用该装置的石墨烯装置制造方法
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Application No.: US13790534Application Date: 2013-03-08
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Publication No.: US08877572B2Publication Date: 2014-11-04
- Inventor: Joo-ho Lee , Yong-seok Jung , Yong-sung Kim , Chang-seung Lee , Chang-youl Moon
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2012-0082239 20120727
- Main IPC: H01L29/66
- IPC: H01L29/66 ; C25D17/00 ; C01B31/02 ; C25B9/00 ; C25F7/00 ; C25B1/00 ; C25F5/00 ; B82Y40/00
Abstract:
A graphene device manufacturing apparatus includes an electrode, a graphene structure including a metal catalyst layer formed on a substrate, a protection layer, and a graphene layer between the protection layer and the metal catalyst layer, a power unit configured to apply a voltage between the electrode and the metal catalyst layer, and an electrolyte in which the graphene structure is at least partially submerged.
Public/Granted literature
- US20140030857A1 GRAPHENE DEVICE MANUFACTURING APPARATUS AND GRAPHENE DEVICE MANUFACTURING METHOD USING THE APPARATUS Public/Granted day:2014-01-30
Information query
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