Invention Grant
- Patent Title: Substrate transfer robot and substrate transfer system
- Patent Title (中): 基板传送机器人和基板传送系统
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Application No.: US13121518Application Date: 2009-09-28
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Publication No.: US08882431B2Publication Date: 2014-11-11
- Inventor: Yasuhiko Hashimoto
- Applicant: Yasuhiko Hashimoto
- Applicant Address: JP Kobe-Shi
- Assignee: Kawasaki Jukogyo Kabushiki Kaisha
- Current Assignee: Kawasaki Jukogyo Kabushiki Kaisha
- Current Assignee Address: JP Kobe-Shi
- Agency: Oliff PLC
- Priority: JP2008-260748 20081007; JP2008-260764 20081007
- International Application: PCT/JP2009/066751 WO 20090928
- International Announcement: WO2010/041562 WO 20100415
- Main IPC: H01L21/67
- IPC: H01L21/67 ; B25J9/10 ; B25J9/04 ; H01L21/677
Abstract:
A robot that includes an end effector for holding a substrate in a substantially horizontal state; a vertical driving unit for driving the end effector to move in a vertical direction; a horizontal driving unit for driving the vertical driving unit to move in a horizontal direction; and a rotation driving unit for rotating the horizontal driving unit about a rotation axis extending in the vertical direction. In this case, one end of the end effector is connected with the vertical driving unit. One end of the vertical driving unit is connected with the horizontal driving unit.
Public/Granted literature
- US20110182702A1 SUBSTRATE TRANSFER ROBOT AND SUBSTRATE TRANSFER SYSTEM Public/Granted day:2011-07-28
Information query
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