发明授权
- 专利标题: Method of producing a perpendicular magnetic recording medium
- 专利标题(中): 制造垂直磁记录介质的方法
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申请号: US12980062申请日: 2010-12-28
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公开(公告)号: US08883249B2公开(公告)日: 2014-11-11
- 发明人: Toshiaki Tachibana , Takahiro Onoue , Keiichi Kajita
- 申请人: Toshiaki Tachibana , Takahiro Onoue , Keiichi Kajita
- 申请人地址: SG Singapore
- 专利权人: WD Media (Singapore) Pte. Ltd.
- 当前专利权人: WD Media (Singapore) Pte. Ltd.
- 当前专利权人地址: SG Singapore
- 优先权: JP2009-297739 20091228
- 主分类号: G11B5/66
- IPC分类号: G11B5/66 ; H01F1/06 ; G11B5/84 ; C23C14/58 ; G11B5/65
摘要:
By improving sliding durability while ensuring a high SNR, an improvement in reliability and a further increase in recording density are to be achieved.The structure of a method of manufacturing a perpendicular magnetic recording medium according to the present invention includes: a main recording layer forming step of forming, on a substrate, at least a main recording layer formed of magnetic particles having a CoCrPt alloy as a main component and a non-magnetic grain boundary part having an oxide as a main component; a split layer forming step of forming a split layer having a Ru alloy or a Co alloy as a main component on the main recording layer; a first heating step of performing a heat treatment on the substrate after the split layer forming step; an auxiliary recording layer forming step of forming an auxiliary recording layer formed of a material having CoCrPt as a main component after the first heating step; a second heating step of performing a heat treatment on the substrate after the auxiliary recording layer forming step; and a protective layer forming step of forming a protective layer having carbon as a main component by CVD after the second heating step.
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