-
公开(公告)号:US20120196049A1
公开(公告)日:2012-08-02
申请号:US13381561
申请日:2010-05-28
申请人: Shuuhei Azuma , Keiichi Kajita , Takashi Morikawa
发明人: Shuuhei Azuma , Keiichi Kajita , Takashi Morikawa
CPC分类号: G11B5/72 , G11B5/8408
摘要: A manufacturing method of a magnetic recording medium provided with a protective layer excellent in corrosion resistance, mechanical durability, adhesion with a lubrication layer, and floating stability of a head even if the film thickness is reduced is provided. This is a manufacturing method of a magnetic recording medium in which at least a magnetic layer, a carbon protective layer, and a lubrication layer are sequentially provided on a substrate, and said carbon protective layer is provided with a lower layer formed on the magnetic layer side and an upper layer formed on the lubrication layer side. The lower layer is formed by a chemical vapor deposition (CVD) method using hydrocarbon gas and then, the upper layer is formed by using mixed gas of hydrocarbon gas and nitrogen gas and then, treatment which nitridizes the surface of the upper layer is applied.
摘要翻译: 提供了具有耐腐蚀性,机械耐久性,与润滑层的粘附性以及头部浮动稳定性优异的保护层的磁记录介质的制造方法,即使膜厚减小。 这是一种磁性记录介质的制造方法,其中至少在基板上依次设有磁性层,碳保护层和润滑层,并且所述碳保护层设置有形成在磁性层上的下层 侧和在润滑层侧形成的上层。 通过使用烃气体的化学气相沉积(CVD)法形成下层,然后通过使用烃气和氮气的混合气体形成上层,然后施加使上层表面氮化的处理。
-
公开(公告)号:US08883249B2
公开(公告)日:2014-11-11
申请号:US12980062
申请日:2010-12-28
CPC分类号: G11B5/66 , C23C14/5806 , G11B5/65 , G11B5/84 , H01F1/06
摘要: By improving sliding durability while ensuring a high SNR, an improvement in reliability and a further increase in recording density are to be achieved.The structure of a method of manufacturing a perpendicular magnetic recording medium according to the present invention includes: a main recording layer forming step of forming, on a substrate, at least a main recording layer formed of magnetic particles having a CoCrPt alloy as a main component and a non-magnetic grain boundary part having an oxide as a main component; a split layer forming step of forming a split layer having a Ru alloy or a Co alloy as a main component on the main recording layer; a first heating step of performing a heat treatment on the substrate after the split layer forming step; an auxiliary recording layer forming step of forming an auxiliary recording layer formed of a material having CoCrPt as a main component after the first heating step; a second heating step of performing a heat treatment on the substrate after the auxiliary recording layer forming step; and a protective layer forming step of forming a protective layer having carbon as a main component by CVD after the second heating step.
摘要翻译: 通过提高滑动耐久性同时确保高SNR,可以实现可靠性的提高和记录密度的进一步提高。 根据本发明的垂直磁记录介质的制造方法的结构包括:主记录层形成步骤,在基板上至少形成由具有CoCrPt合金作为主要成分的磁性颗粒形成的主记录层 和具有氧化物作为主要成分的非磁性晶界部分; 在主记录层上形成具有Ru合金或Co合金作为主要成分的分割层的分割层形成步骤; 第一加热步骤,在所述分裂层形成步骤之后对所述基板进行热处理; 在第一加热步骤之后形成由具有CoCrPt作为主要成分的材料形成的辅助记录层的辅助记录层形成步骤; 在辅助记录层形成步骤之后对衬底进行热处理的第二加热步骤; 以及保护层形成步骤,在第二加热步骤之后通过CVD形成以碳为主要成分的保护层。
-
公开(公告)号:US20110206947A1
公开(公告)日:2011-08-25
申请号:US12980062
申请日:2010-12-28
CPC分类号: G11B5/66 , C23C14/5806 , G11B5/65 , G11B5/84 , H01F1/06
摘要: By improving sliding durability while ensuring a high SNR, an improvement in reliability and a further increase in recording density are to be achieved.The structure of a method of manufacturing a perpendicular magnetic recording medium according to the present invention includes: a main recording layer forming step of forming, on a substrate, at least a main recording layer formed of magnetic particles having a CoCrPt alloy as a main component and a non-magnetic grain boundary part having an oxide as a main component; a split layer forming step of forming a split layer having a Ru alloy or a Co alloy as a main component on the main recording layer; a first heating step of performing a heat treatment on the substrate after the split layer forming step; an auxiliary recording layer forming step of forming an auxiliary recording layer formed of a material having CoCrPt as a main component after the first heating step; a second heating step of performing a heat treatment on the substrate after the auxiliary recording layer forming step; and a protective layer forming step of forming a protective layer having carbon as a main component by CVD after the second heating step.
摘要翻译: 通过提高滑动耐久性同时确保高SNR,可以实现可靠性的提高和记录密度的进一步提高。 根据本发明的垂直磁记录介质的制造方法的结构包括:主记录层形成步骤,在基板上至少形成由具有CoCrPt合金作为主要成分的磁性颗粒形成的主记录层 和具有氧化物作为主要成分的非磁性晶界部分; 在主记录层上形成具有Ru合金或Co合金作为主要成分的分割层的分割层形成步骤; 第一加热步骤,在所述分裂层形成步骤之后对所述基板进行热处理; 在第一加热步骤之后形成由具有CoCrPt作为主要成分的材料形成的辅助记录层的辅助记录层形成步骤; 在辅助记录层形成步骤之后对衬底进行热处理的第二加热步骤; 以及保护层形成步骤,在第二加热步骤之后通过CVD形成以碳为主要成分的保护层。
-
-