Invention Grant
- Patent Title: Micromechanical system and method for building a micromechanical system
- Patent Title (中): 微机械系统和微机械系统的构建方法
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Application No.: US13138852Application Date: 2009-04-07
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Publication No.: US08887568B2Publication Date: 2014-11-18
- Inventor: Roman Forke , Dirk Scheibner , Alexey Shaporin
- Applicant: Roman Forke , Dirk Scheibner , Alexey Shaporin
- Applicant Address: DE Munich
- Assignee: Siemens Aktiengesellschaft
- Current Assignee: Siemens Aktiengesellschaft
- Current Assignee Address: DE Munich
- Agency: Staas & Halsey LLP
- International Application: PCT/EP2009/002773 WO 20090407
- International Announcement: WO2010/115445 WO 20101014
- Main IPC: G01P15/125
- IPC: G01P15/125 ; B81B3/00

Abstract:
A micromechanical system with a system that can vibrate, has a seismic mass and at least two spring elements. The spring elements are respectively fastened on one side externally to the seismic mass and on the other side to fixed anchor points of the micromechanical system such that the seismic mass can vibrate in a movement direction. In order to obtain a particularly large frequency spacing between the useful mode and further vibration modes of the system, at least one further spring element is provided in the inner region of the seismic mass. The further spring element the is fastened to a further anchor point of the micromechanical system. A method builds a micromechanical system with a system that can vibrate.
Public/Granted literature
- US20120024066A1 MICROMECHANICAL SYSTEM AND METHOD FOR BUILDING A MICROMECHANICAL SYSTEM Public/Granted day:2012-02-02
Information query
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