Invention Grant
US08907498B2 Semiconductor device and method of forming a shielding layer between stacked semiconductor die
有权
半导体器件和在堆叠的半导体管芯之间形成屏蔽层的方法
- Patent Title: Semiconductor device and method of forming a shielding layer between stacked semiconductor die
- Patent Title (中): 半导体器件和在堆叠的半导体管芯之间形成屏蔽层的方法
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Application No.: US13691440Application Date: 2012-11-30
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Publication No.: US08907498B2Publication Date: 2014-12-09
- Inventor: Reza A. Pagaila , Byung Tai Do , Nathapong Suthiwongsunthorn
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/29
- IPC: H01L23/29 ; H01L23/552 ; H01L25/065 ; H01L25/00 ; H01L23/498 ; H01L23/538 ; H01L23/31 ; H01L21/56 ; H01L23/00

Abstract:
A semiconductor device has a first semiconductor die with a shielding layer formed over its back surface. The first semiconductor die is mounted to a carrier. A first insulating layer is formed over the shielding layer. A second semiconductor die is mounted over the first semiconductor die separated by the shielding layer and first insulating layer. A second insulating layer is deposited over the first and second semiconductor die. A first interconnect structure is formed over the second semiconductor die and second insulating layer. A second interconnect structure is formed over the first semiconductor die and second insulating layer. The shielding layer is electrically connected to a low-impedance ground point through a bond wire, RDL, or TSV. The second semiconductor die may also have a shielding layer formed on its back surface. The semiconductor die are bonded through the metal-to-metal shielding layers.
Public/Granted literature
- US20130087897A1 Semiconductor Device and Method of Forming a Shielding Layer Between Stacked Semiconductor Die Public/Granted day:2013-04-11
Information query
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