Invention Grant
- Patent Title: Method for controlling ion energy in radio frequency plasmas
- Patent Title (中): 控制射频等离子体离子能量的方法
-
Application No.: US14075026Application Date: 2013-11-08
-
Publication No.: US08933629B2Publication Date: 2015-01-13
- Inventor: Brian George Heil , Uwe Czarnetzki , Ralf Peter Brinkmann , Thomas Mussenbrock
- Applicant: Ruhr-Universität Bochum
- Applicant Address: DE Bochum
- Assignee: Ruhr-Universität Bochum
- Current Assignee: Ruhr-Universität Bochum
- Current Assignee Address: DE Bochum
- Main IPC: H01J7/24
- IPC: H01J7/24 ; H01J31/26 ; H01J13/48 ; H01J15/04 ; H01J17/36 ; H05B37/00 ; H05B39/00 ; H05B41/00 ; H01J37/32 ; H01J37/04 ; B44C1/22 ; C03C15/00 ; C03C25/68 ; C23F1/00
Abstract:
A method of establishing a DC bias in front of at least one electrode in a plasma operating apparatus by applying an RF voltage with at least two harmonic frequency components with a controlled relative phase between the components, where at least one of the higher frequency components is established as an even multiple of the lower frequency component.
Public/Granted literature
- US20140103808A1 METHOD FOR CONTROLLING ION ENERGY IN RADIO FREQUENCY PLASMAS Public/Granted day:2014-04-17
Information query
