Invention Grant
- Patent Title: Combined probe head for a vertical probe card and method for assembling and aligning the combined probe head thereof
- Patent Title (中): 用于垂直探针卡的组合探头和用于组装和对准其组合探头的方法
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Application No.: US13189572Application Date: 2011-07-25
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Publication No.: US08933719B2Publication Date: 2015-01-13
- Inventor: Chao-Ching Huang , Wen-Chi Chen , Chiu-Chu Chang
- Applicant: Chao-Ching Huang , Wen-Chi Chen , Chiu-Chu Chang
- Applicant Address: TW Chu-Pei
- Assignee: MPI Corporation
- Current Assignee: MPI Corporation
- Current Assignee Address: TW Chu-Pei
- Agent Ding Yu Tan
- Priority: TW99124636A 20100727
- Main IPC: G01R31/00
- IPC: G01R31/00 ; G01R1/073 ; G01R31/28 ; G01R3/00

Abstract:
A combined probe head being disposed in a space transformer of a vertical probe card is provided, in which the combined probe head is used for differentiating or segmenting a layout area of the probes in the vertical probe card. The combined probe head may include a locating plate and sub-probe heads. The locating plate may include fixed portions. Each sub-probe head may include corresponding sub-dies and probes inserted between the sub-dies, and each sub-probe head is assembled and fixed in the corresponding fixed portion. Therefore, the layout area of the probes in the vertical probe card can be respectively differentiated or segmented from the sub-probe heads in order to avoid mutual interference under repair process. In addition, a related method for assembling and aligning the above mentioned combined probe head is provided.
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