发明授权
- 专利标题: AG base alloy thin film and sputtering target for forming AG base alloy thin film
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申请号: US13437350申请日: 2012-04-02
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公开(公告)号: US08936856B2公开(公告)日: 2015-01-20
- 发明人: Yuuki Tauchi , Katsutoshi Takagi , Junichi Nakai , Toshiki Sato
- 申请人: Yuuki Tauchi , Katsutoshi Takagi , Junichi Nakai , Toshiki Sato
- 申请人地址: JP Kobe-shi
- 专利权人: Kobe Steel, Ltd.
- 当前专利权人: Kobe Steel, Ltd.
- 当前专利权人地址: JP Kobe-shi
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JP2002-231596 20020808; JP2002-233283 20020809; JP2002-239972 20020820; JP2002-361117 20021212; JP2003-003643 20030109; JP2003-004586 20030110; JP2003-122314 20030425
- 主分类号: B32B15/00
- IPC分类号: B32B15/00 ; C22C5/06 ; C22C5/08 ; C22C1/00 ; C23C14/02 ; C23C14/18 ; C23C14/20 ; C23C14/34 ; C23C14/58 ; G02B5/08 ; G11B7/252 ; G11B7/257 ; G11B7/258 ; G11B7/259 ; G11B7/26 ; G11B7/2531
摘要:
The present invention relates to an Ag alloy film. Particularly, it is preferably used as a reflective film or semi-transmissive reflective film for an optical information recording medium having high thermal conductivity/high reflectance/high durability in the field of optical information recording media, an electromagnetic-shielding film excellent in Ag aggregation resistance, and an optical reflective film on the back of a reflection type liquid crystal display device, or the like. The Ag alloy film of the present invention comprises an Ag base alloy containing Bi and/or Sb in a total amount of 0.005 to 10% (in terms of at %). Further, the present invention relates to a sputtering target used for the deposition of such an Ag alloy film.
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