发明授权
- 专利标题: Coating device and coating method
- 专利标题(中): 涂布装置和涂布方法
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申请号: US13375938申请日: 2010-05-13
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公开(公告)号: US08940367B2公开(公告)日: 2015-01-27
- 发明人: Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
- 申请人: Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
- 申请人地址: DE Munich
- 专利权人: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- 当前专利权人: Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
- 当前专利权人地址: DE Munich
- 代理机构: Brinks Gilson & Lione
- 优先权: DE102009023472 20090602
- 国际申请: PCT/EP2010/056621 WO 20100513
- 国际公布: WO2010/139541 WO 20101209
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; C23C16/22 ; C23C16/24 ; C23C16/26 ; C23C16/44 ; C23C16/52
摘要:
A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shielding element which can protect at least the securing point at least partially against the effect of the gaseous precursor is provided. The shielding element has a longitudinal extension having a first side and a second side, the first side being arranged on the support element and a locking element being arranged on the second side of the shielding element, the locking element having at least one outlet. At least one separation wall is arranged inside the shielding element, the wall separating the inner volume of the shielding element into a first partial volume and into a second partial volume.
公开/授权文献
- US20120135144A1 COATING DEVICE AND COATING METHOD 公开/授权日:2012-05-31
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