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公开(公告)号：US20120135144A1
公开(公告)日：2012-05-31
申请号：US13375938
申请日：2010-05-13
申请人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
发明人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
IPC分类号： C23C16/455
摘要： A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shielding element which can protect at least the securing point at least partially against the effect of the gaseous precursor is provided. The shielding element has a longitudinal extension having a first side and a second side, the first side being arranged on the support element and a locking element being arranged on the second side of the shielding element, the locking element having at least one outlet. At least one separation wall is arranged inside the shielding element, the wall separating the inner volume of the shielding element into a first partial volume and into a second partial volume.
摘要翻译： 一种涂覆装置包括至少一个可被抽空的接收器，其被提供以接收基底，至少一个气体供应装置，其能够将至少一种气态前体引入接收器;以及至少一个激活装置，其包含至少一个 可加热激活元件，其端部固定到支撑元件上的固定点。 提供了可以至少部分地抵御气态前体的影响来保护至少保护点的屏蔽元件。 屏蔽元件具有纵向延伸部，其具有第一侧面和第二侧面，第一侧面布置在支撑元件上，锁定元件布置在屏蔽元件的第二侧上，锁定元件具有至少一个出口。 至少一个分隔壁布置在屏蔽元件内部，壁将屏蔽元件的内部容积分成第一部分体积并进入第二部分体积。
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公开(公告)号：US08986452B2
公开(公告)日：2015-03-24
申请号：US13375971
申请日：2010-05-13
申请人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
发明人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
摘要： A coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device to be virtually immobile relative to the recipient. In a corresponding method, an electric current can be supplied to the activation element via at least two contact elements and at least one of the contact elements is designed to contact the activation element in alternating contact points.
摘要翻译： 一种涂层装置，其至少包含一个能抽真空并且适于容纳衬底的容器，至少一个气体供应装置，用于将至少一种气态前体引入到容器中，以及至少一个可加热活化元件，其具有 可定义的纵向延伸部分，并通过至少一个相关联的机械紧固装置固定，以相对于接受者几乎不可移动。 在相应的方法中，可以经由至少两个接触元件将电流提供给激活元件，并且至少一个接触元件被设计成在交替接触点中接触激活元件。
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公开(公告)号：US08940367B2
公开(公告)日：2015-01-27
申请号：US13375938
申请日：2010-05-13
申请人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
发明人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
摘要： A coating installation includes at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. A shielding element which can protect at least the securing point at least partially against the effect of the gaseous precursor is provided. The shielding element has a longitudinal extension having a first side and a second side, the first side being arranged on the support element and a locking element being arranged on the second side of the shielding element, the locking element having at least one outlet. At least one separation wall is arranged inside the shielding element, the wall separating the inner volume of the shielding element into a first partial volume and into a second partial volume.
摘要翻译： 一种涂覆装置包括至少一个可被抽空的接收器，其被提供以接收基底，至少一个气体供应装置，其能够将至少一种气态前体引入接收器;以及至少一个激活装置，其包含至少一个 可加热激活元件，其端部固定到支撑元件上的固定点。 提供了可以至少部分地抵御气态前体的影响来保护至少保护点的屏蔽元件。 屏蔽元件具有纵向延伸部，其具有第一侧面和第二侧面，第一侧面布置在支撑元件上，锁定元件布置在屏蔽元件的第二侧上，锁定元件具有至少一个出口。 至少一个分隔壁布置在屏蔽元件内部，壁将屏蔽元件的内部容积分成第一部分体积并进入第二部分体积。
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公开(公告)号：US20120114855A1
公开(公告)日：2012-05-10
申请号：US13375926
申请日：2010-05-17
申请人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
发明人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
IPC分类号： C23C16/44
摘要： A coating method can use a coating device containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device. Electric current can be supplied to the activation element via at least two contact elements and the contact elements are fastened so as to be virtually immobile relative to the recipient. The activation element is arranged so as to be mobile relative to the recipient.
摘要翻译： 涂覆方法可以使用包含至少一个可以抽真空并且适于容纳基底的接收器的涂覆装置，用于将至少一种气态前体引入接受体的至少一个气体供应装置和至少一个可加热的 激活元件具有可定义的纵向延伸部，并且通过至少一个相关联的机械紧固装置紧固。 可以通过至少两个接触元件将电流提供给激活元件，并且紧固接触元件以相对于接收器几乎不可移动。 激活元件被布置为相对于接收者是可移动的。
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公开(公告)号：US20120107501A1
公开(公告)日：2012-05-03
申请号：US13375957
申请日：2010-05-13
申请人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
发明人： Tino Harig , Markus Höfer , Artur Laukart , Lothar Schäfer , Markus Armgardt
IPC分类号： C23C16/52 , C23C16/50 , C23C16/448 , C23C16/455
摘要： A coating installation containing at least one recipient which can be evacuated and which is provided to receive a substrate, at least one gas supply device which can introduce at least one gaseous precursor into the recipient, and at least one activation device which contains at least one heatable activation element, the end thereof being secured to a securing point on a support element. In the related method, the activation element can be heated by at least one first heating device and at least one second heating device, the first heating device enabling energy to be input in a uniform manner over the longitudinal extension of the activation element and the second heating device enabling energy to be input in a changeable manner over the longitudinal extension of the activation element such that the temperature of the activation element, in at least one longitudinal section, can be brought to over 1300° C. due to the effect of the second heating element.
摘要翻译： 一种涂覆装置，其至少包含一个可被排空的接收器，并且被提供以接纳基底，至少一个可将至少一种气态前体引入到接收器中的气体供应装置，以及至少一个包含至少一个 可加热激活元件，其端部固定到支撑元件上的固定点。 在相关方法中，激活元件可以被至少一个第一加热装置和至少一个第二加热装置加热，第一加热装置使能量能够以均匀的方式输入到激活元件的纵向延伸部上，而第二加热装置 加热装置能够在活动元件的纵向延伸部上以可更改的方式输入能量，使得在至少一个纵向截面中的激活元件的温度可以达到超过1300℃，这是由于 第二加热元件。
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公开(公告)号：US20120100310A1
公开(公告)日：2012-04-26
申请号：US13375971
申请日：2010-05-13
申请人： Tino Harig , Markus Höfer , Artur Laukart , Lother Schäfer , Markus Armgardt
发明人： Tino Harig , Markus Höfer , Artur Laukart , Lother Schäfer , Markus Armgardt
摘要： A coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device to be virtually immobile relative to the recipient. In a corresponding method, an electric current can be supplied to the activation element via at least two contact elements and at least one of the contact elements is designed to contact the activation element in alternating contact points.
摘要翻译： 一种涂层装置，其至少包含一个能抽真空并且适于容纳衬底的容器，至少一个气体供应装置，用于将至少一种气态前体引入到容器中，以及至少一个可加热活化元件，其具有 可定义的纵向延伸部分，并通过至少一个相关联的机械紧固装置固定，以相对于接受者几乎不可移动。 在相应的方法中，可以经由至少两个接触元件将电流提供给激活元件，并且至少一个接触元件被设计成在交替接触点中接触激活元件。
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公开(公告)号：US20110318490A1
公开(公告)日：2011-12-29
申请号：US13254558
申请日：2010-03-01
申请人： Lothar Schäfer , Markus Höfer , Tino Harig , Artur Laukart
发明人： Lothar Schäfer , Markus Höfer , Tino Harig , Artur Laukart
IPC分类号： C23C16/44
CPC分类号： C23C16/00 , C23C16/271 , C23C16/452
摘要： A coating apparatus and method for depositing a coating that contains at least one first element on a substrate by an activated vapor deposition, wherein the substrate is introduced into a gas atmosphere that contains at least the first element, and the gas atmosphere is activated by a heated activation element, wherein the first element is selected from among silicon, germanium, carbon, boron, or nitrogen, and the material of the activation element contains at least one metal and at least one second element, wherein the second element is selected from among silicon, boron, germanium, carbon, and/or nitrogen and is different from the first element.
摘要翻译： 一种涂覆装置和方法，用于通过活化的气相沉积在衬底上沉积包含至少一个第一元素的涂层，其中将衬底引入至少包含第一元素的气体气氛中，并且气体气氛由 加热的激活元件，其中第一元件选自硅，锗，碳，硼或氮，并且活化元件的材料包含至少一种金属和至少一种第二元素，其中第二元素选自 硅，硼，锗，碳和/或氮，并且与第一元素不同。
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