Invention Grant
- Patent Title: Readout methodology for multi-channel acquisition of spatially distributed signal
- Patent Title (中): 多通道采集空间分布信号的读出方法
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Application No.: US13172030Application Date: 2011-06-29
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Publication No.: US08941049B2Publication Date: 2015-01-27
- Inventor: Gabor Toth , Stuart Friedman , Khashayar Shadman
- Applicant: Gabor Toth , Stuart Friedman , Khashayar Shadman
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G06F19/00
- IPC: G06F19/00 ; G01J3/28

Abstract:
A readout apparatus and method for processing spatially distributed signals is disclosed. The readout apparatus and method may reduce/eliminate the impact gain variations among a plurality of sensing channels. This is done by continuously varying the dispersion properties of a signal distribution device, which may induce a spatial shift of the signal distribution during data acquisition, allowing the distributed signals to move across the sensor area. Shifting of the distributed signals may occur multiple times, hence eliminating the impact of gain variation across the sensor array. The accumulated data may be re-assembled subsequently to complete the readout operation.
Public/Granted literature
- US20120029854A1 READOUT METHODOLOGY FOR MULTI-CHANNEL ACQUISITION OF SPATIALLY DISTRIBUTED SIGNAL Public/Granted day:2012-02-02
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