发明授权
- 专利标题: Charged particle beam device having an energy filter
- 专利标题(中): 具有能量过滤器的带电粒子束装置
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申请号: US14126792申请日: 2012-04-16
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公开(公告)号: US08946649B2公开(公告)日: 2015-02-03
- 发明人: Yuko Sasaki , Hiroyuki Ito
- 申请人: Yuko Sasaki , Hiroyuki Ito
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Crowell & Moring LLP
- 优先权: JP2011-133793 20110616
- 国际申请: PCT/JP2012/002606 WO 20120416
- 国际公布: WO2012/172720 WO 20121220
- 主分类号: H01J37/28
- IPC分类号: H01J37/28 ; H01J37/05 ; H01J37/244 ; H01J37/26
摘要:
Provided is a charged particle beam device to improve energy solution of its energy filter. In one embodiment, a charged particle beam device includes a deflector to deflect charged particles emitted from a sample to an energy filter, and a change in brightness value with the change of voltage applied to the energy filter is found for each of a plurality of deflection conditions for the deflector, and a deflection condition such that a change in the brightness value satisfies a predetermined condition is set as the deflection condition for the deflector.
公开/授权文献
- US20140124666A1 Charged Particle Beam Device 公开/授权日:2014-05-08