发明授权
US08948562B2 Replication of patterned thin-film structures for use in plasmonics and metamaterials
有权
用于等离子体激元和超材料的图案化薄膜结构的复制
- 专利标题： Replication of patterned thin-film structures for use in plasmonics and metamaterials
- 专利标题（中）： 用于等离子体激元和超材料的图案化薄膜结构的复制
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申请号： US13131197申请日： 2009-11-24
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公开(公告)号： US08948562B2公开(公告)日： 2015-02-03
- 发明人: David J. Norris , Sang Eon Han , Aditya Bhan , Prashant Nagpal , Nathan Charles Lindquist , Sang-Hyun Oh
- 申请人： David J. Norris , Sang Eon Han , Aditya Bhan , Prashant Nagpal , Nathan Charles Lindquist , Sang-Hyun Oh
- 申请人地址： US MN St. Paul
- 专利权人： Regents of the University of Minnesota
- 当前专利权人： Regents of the University of Minnesota
- 当前专利权人地址： US MN St. Paul
- 代理机构： Kagan Binder, PLLC
- 国际申请： PCT/US2009/006255 WO 20091124
- 国际公布： WO2010/065071 WO 20100610
- 主分类号： H01L21/00
- IPC分类号： H01L21/00 ; H01L21/28 ; H01L51/50 ; H01L51/52 ; B81C99/00 ; B82Y10/00 ; B82Y40/00 ; G03F7/00
摘要：
The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.
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