发明授权
- 专利标题: Temperature control system and temperature control method for substrate mounting table
- 专利标题(中): 温度控制系统和基板安装台的温度控制方法
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申请号: US12902225申请日: 2010-10-12
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公开(公告)号: US08950469B2公开(公告)日: 2015-02-10
- 发明人: Yasuharu Sasaki , Ryo Nonaka , Nobuyuki Nagayama
- 申请人: Yasuharu Sasaki , Ryo Nonaka , Nobuyuki Nagayama
- 申请人地址: JP Tokyo
- 专利权人: Tokyo Electron Limited
- 当前专利权人: Tokyo Electron Limited
- 当前专利权人地址: JP Tokyo
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2009-237225 20091014
- 主分类号: B31F1/00
- IPC分类号: B31F1/00 ; B44C1/175 ; B29C65/00 ; H01L21/67
摘要:
A temperature control system includes a heat transfer medium supply configured to supply a first heat transfer medium of a first temperature into a heat transfer medium path; at least one heat transfer medium storage provided between the heat transfer medium path and the heat transfer medium supply and configured to store a second heat transfer medium of a second temperature higher than the first temperature; a heat transfer medium supply control device provided between the heat transfer medium supply and the heat transfer medium path and between the heat transfer medium storage and the heat transfer medium path and configured to stop a supply of the first heat transfer medium into the heat transfer medium path from the heat transfer medium supply and to supply the second heat transfer medium into the heat transfer medium path from the heat transfer medium storage when a heating unit generates heat.