发明授权
US08952605B2 Metal hexaboride cold field emitter, method of fabricating same, and electron gun
有权
金属六硼化物冷场发射器，其制造方法和电子枪
- 专利标题： Metal hexaboride cold field emitter, method of fabricating same, and electron gun
- 专利标题（中）： 金属六硼化物冷场发射器，其制造方法和电子枪
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申请号： US14370082申请日： 2013-06-26
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公开(公告)号： US08952605B2公开(公告)日： 2015-02-10
- 发明人: Han Zhang , Jie Tang , Luchang Qin , Jinshi Yuan , Norio Shinya , Yasushi Yamauchi
- 申请人： National Institute for Materials Science
- 申请人地址： JP Ibaraki
- 专利权人： National Institute for Materials Science
- 当前专利权人： National Institute for Materials Science
- 当前专利权人地址： JP Ibaraki
- 代理机构： Wenderoth, Lind & Ponack, LLP.
- 优先权： JP2012-149031 20120703
- 国际申请： PCT/JP2013/067491 WO 20130626
- 国际公布： WO2014/007121 WO 20140109
- 主分类号： H01J29/46
- IPC分类号： H01J29/46 ; H01J1/304 ; H01J37/073 ; H01J37/285
摘要：
A metal hexaboride nanowire such as LaB6 with the formed metal-terminated (100) plane at the tip has a small work function, and can emit a very narrow electron beam from the (100) plane. In such emitters, contamination occurs in a very short time period, and the output current greatly decreases when used under low temperature. The cold field emitter of the present invention overcomes this problem with a stabilization process that exposes the metal-terminated (100) plane of the tip to hydrogen at low temperature, and can stably operate over extended time periods.
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