Invention Grant
US08952605B2 Metal hexaboride cold field emitter, method of fabricating same, and electron gun
有权
金属六硼化物冷场发射器，其制造方法和电子枪
- Patent Title: Metal hexaboride cold field emitter, method of fabricating same, and electron gun
- Patent Title (中): 金属六硼化物冷场发射器，其制造方法和电子枪
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Application No.: US14370082Application Date: 2013-06-26
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Publication No.: US08952605B2Publication Date: 2015-02-10
- Inventor: Han Zhang , Jie Tang , Luchang Qin , Jinshi Yuan , Norio Shinya , Yasushi Yamauchi
- Applicant: National Institute for Materials Science
- Applicant Address: JP Ibaraki
- Assignee: National Institute for Materials Science
- Current Assignee: National Institute for Materials Science
- Current Assignee Address: JP Ibaraki
- Agency: Wenderoth, Lind & Ponack, LLP.
- Priority: JP2012-149031 20120703
- International Application: PCT/JP2013/067491 WO 20130626
- International Announcement: WO2014/007121 WO 20140109
- Main IPC: H01J29/46
- IPC: H01J29/46 ; H01J1/304 ; H01J37/073 ; H01J37/285
Abstract:
A metal hexaboride nanowire such as LaB6 with the formed metal-terminated (100) plane at the tip has a small work function, and can emit a very narrow electron beam from the (100) plane. In such emitters, contamination occurs in a very short time period, and the output current greatly decreases when used under low temperature. The cold field emitter of the present invention overcomes this problem with a stabilization process that exposes the metal-terminated (100) plane of the tip to hydrogen at low temperature, and can stably operate over extended time periods.
Public/Granted literature
- US20150002009A1 METAL HEXABORIDE COLD FIELD EMITTER, METHOD OF FABRICATING SAME, AND ELECTRON GUN Public/Granted day:2015-01-01
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